Plasma-Enhanced Chemical Vapor Deposition Growth of Fluorinated Amorphous Carbon Thin Films Using C4F8and Si2H6/He for Low-Dielectric-Constant Intermetallic-Layer Dielectrics
2005 ◽
Vol 44
(7A)
◽
pp. 4886-4890
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2000 ◽
Vol 39
(Part 2, No. 12B)
◽
pp. L1324-L1326
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2008 ◽
Vol 53
(1)
◽
pp. 351-356
◽
1999 ◽
Vol 38
(Part 1, No. 3A)
◽
pp. 1356-1358
◽