Synchrotron X-ray scattering and reflectivity studies of the structure of low dielectric constant SiOCH thin films prepared from bistrimethylsilylmethane by chemical vapor deposition
2006 ◽
Vol 40
(s1)
◽
pp. s614-s619
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Keyword(s):
X Ray
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2000 ◽
Vol 39
(Part 2, No. 12B)
◽
pp. L1324-L1326
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2008 ◽
Vol 53
(1)
◽
pp. 351-356
◽
2005 ◽
Vol 44
(7A)
◽
pp. 4886-4890
◽
1999 ◽
Vol 38
(Part 1, No. 3A)
◽
pp. 1356-1358
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2008 ◽
Vol 53
(9(5))
◽
pp. 2512-2517