Characterization of Microcrystalline Silicon Thin Film Transistors Fabricated by Thermal Plasma Jet Crystallization Technique

2010 ◽  
Vol 49 (3) ◽  
pp. 03CA08 ◽  
Author(s):  
Seiichiro Higashi ◽  
Kenji Sugakawa ◽  
Hirotaka Kaku ◽  
Tatsuya Okada ◽  
Seiichi Miyazaki
Keyword(s):  
Thin Film ◽  
Thermal Plasma ◽  
Thin Film Transistors ◽  
Plasma Jet ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film ◽  
Thermal Plasma Jet

P-1.9: Characterization of Self-Aligned Top-Gate Microcrystalline Silicon Thin Film Transistors

2018 ◽  
Vol 49 ◽  
pp. 544-546
Author(s):  
Meng Zhang ◽  
Yan Yan ◽  
Sunbin Deng ◽  
Wei Zhou ◽  
Rongsheng Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film

scholarly journals Crystallization of amorphous silicon thin film by using a thermal plasma jet

2009 ◽  
Vol 517 (14) ◽  
pp. 4070-4073
Author(s):  
Hyun Seok Lee ◽  
Sooseok Choi ◽  
Sung Woo Kim ◽  
Sang Hee Hong
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Thermal Plasma ◽  
Plasma Jet ◽  
Silicon Thin Film ◽  
Thermal Plasma Jet

Influence of the deposition temperature on the performance of microcrystalline silicon thin film transistors

2008 ◽  
Vol 52 (3) ◽  
pp. 432-435 ◽  
Author(s):  
Maher Oudwan ◽  
Alexey Abramov ◽  
Pere Roca i Cabarrocas ◽  
François Templier
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Deposition Temperature ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film

Low temperature processed p-type bottom gate microcrystalline silicon thin film transistors

2010 ◽  
pp. NA-NA
Author(s):  
O. Moustapha ◽  
A. Abramov ◽  
D. Daineka ◽  
M. Oudwan ◽  
Y. Bonnassieux ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film ◽  
P Type ◽  
Bottom Gate
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