Estimate of the Negative-Ion Density in O2/Ar ECR Plasma Utilizing Ion Acoustic Waves
2001 ◽
Vol 70
(3)
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pp. 621-623
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1999 ◽
Vol 61
(2)
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pp. 177-189
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2002 ◽
Vol 407
(1-2)
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pp. 204-208
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1995 ◽
Vol 54
(3)
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pp. 295-308
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1991 ◽
Vol 19
(3)
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pp. 545-547
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Keyword(s):
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