Surface Morphology and Electrical Properties of ZnO:Ga Films Formed by Magnetron Sputtering

2014 ◽  
Vol 58 (47) ◽  
pp. 45-50 ◽  
Author(s):  
N. Yamamoto ◽  
K. Morisawa
Keyword(s):  
Electrical Properties ◽  
Surface Morphology ◽  
Magnetron Sputtering

scholarly journals The Influence of Hydrogen on the Properties of Zinc Sulfide Thin Films Deposited by Magnetron Sputtering

2014 ◽  
Vol 2014 ◽  
pp. 1-6
Author(s):  
Hang Xu ◽  
Lili Wu ◽  
Wenwu Wang ◽  
Lixiang Zhang ◽  
Jingquan Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Surface Morphology ◽  
Magnetron Sputtering ◽  
Crystallite Size ◽  
Zinc Sulfide ◽  
Stoichiometric Composition ◽  
Band Gaps ◽  
Optical And Electrical Properties ◽  
Radio Frequency Magnetron Sputtering

Zinc sulfide thin films have been deposited with hydrogen in Ar and Ar+H2atmosphere by radio frequency magnetron sputtering. The thickness, structural properties, composition, surface morphology, and optical and electrical properties of the films have been investigated. Effect of hydrogen on the properties of the film was studied. The results showed that hydrogen leads to better crystallinity and larger crystallite size of ZnS polycrystalline films. The band gaps of the films in Ar+H2are about 3.48 eV compared with 3.24 eV without hydrogen. It is also demonstrated that hydrogen can result in a better stoichiometric composition of the films.

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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