(Invited) The Novel Spin-on Hard Mask and Ultra Thin UL Material for EUVL

2014 ◽  
Vol 60 (1) ◽  
pp. 263-271
Author(s):  
R. Sakamoto ◽  
H. Yaguchi ◽  
S. Shigaki ◽  
S. Sassa ◽  
N. Fujitani ◽  
...  
Keyword(s):  
2018 ◽  
Vol 282 ◽  
pp. 238-243
Author(s):  
Harald Okorn-Schmidt ◽  
Philipp Engesser ◽  
Manuel Linder ◽  
Jörg Hofer-Moser

In this paper we demonstrate an effective process control mechanism to significantly improve on the process performance of a BEOL post-etch cleaning process with an integrated partial or complete removal of the TiN HM (hard mask) layer by so called formulated chemistries on a single wafer processing tool. The novel process control mechanism enables a 50% reduction in chemical consumption while achieving an at least equivalent TiN etch uniformity.


2012 ◽  
Author(s):  
Rikimaru Sakamoto ◽  
Hiroaki Yaguchi ◽  
Syuhei Shigaki ◽  
Suguru Sassa ◽  
Noriaki Fujitani ◽  
...  
Keyword(s):  

2010 ◽  
Vol 34 (8) ◽  
pp. S33-S33
Author(s):  
Wenchao Ou ◽  
Haifeng Chen ◽  
Yun Zhong ◽  
Benrong Liu ◽  
Keji Chen

Author(s):  
Fabrice B. R. Parmentier ◽  
Pilar Andrés

The presentation of auditory oddball stimuli (novels) among otherwise repeated sounds (standards) triggers a well-identified chain of electrophysiological responses: The detection of acoustic change (mismatch negativity), the involuntary orientation of attention to (P3a) and its reorientation from the novel. Behaviorally, novels reduce performance in an unrelated visual task (novelty distraction). Past studies of the cross-modal capture of attention by acoustic novelty have typically discarded from their analysis the data from the standard trials immediately following a novel, despite some evidence in mono-modal oddball tasks of distraction extending beyond the presentation of deviants/novels (postnovelty distraction). The present study measured novelty and postnovelty distraction and examined the hypothesis that both types of distraction may be underpinned by common frontally-related processes by comparing young and older adults. Our data establish that novels delayed responses not only on the current trial and but also on the subsequent standard trial. Both of these effects increased with age. We argue that both types of distraction relate to the reconfiguration of task-sets and discuss this contention in relation to recent electrophysiological studies.


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