Process Parameter Control for BEOL TiN Hard Mask Etch-Back

2018 ◽  
Vol 282 ◽  
pp. 238-243
Author(s):  
Harald Okorn-Schmidt ◽  
Philipp Engesser ◽  
Manuel Linder ◽  
Jörg Hofer-Moser
Keyword(s):  
Process Control ◽  
Control Mechanism ◽  
Complete Removal ◽  
Parameter Control ◽  
Process Performance ◽  
The Novel ◽  
Cleaning Process ◽  
Hard Mask ◽  
Mask Layer ◽  
Wafer Processing

In this paper we demonstrate an effective process control mechanism to significantly improve on the process performance of a BEOL post-etch cleaning process with an integrated partial or complete removal of the TiN HM (hard mask) layer by so called formulated chemistries on a single wafer processing tool. The novel process control mechanism enables a 50% reduction in chemical consumption while achieving an at least equivalent TiN etch uniformity.

Development of an Integrated FMEA (i-FMEA) Using DAIREC Methodology for Automotive Manufacturing Company

2013 ◽  
Vol 315 ◽  
pp. 176-180 ◽  
Author(s):  
A.R. Soufhwee ◽  
A. Hambali ◽  
M.A. Rahman ◽  
H. Hanizam
Keyword(s):  
Regression Analysis ◽  
Process Control ◽  
Design Stage ◽  
Process Performance ◽  
Performance Indices ◽  
Automotive Manufacturing ◽  
Process Factor ◽  
Current Process ◽  
Important Requirement ◽  
Quality Product

Quality, reliability, and safety of products are the most important requirement of manufacturer in order to maintain their product competitiveness in market. Customers needs related to quality product in the market therefore drive the design and process activities to a high quantity of analysis. One possibility to reduce the number of activities is to integrate FMEA (i-FMEA) to merge Design FMEA (DFMEA) and Process (PFMEA) through DAIREC methodology. In this paper, a regression analysis between critical dimensional decided during design stage and key process factor in current process control is analyzed using MINITAB software. A judgment on a new ranking has been decided based on process performance indices (Ppk) for improvement lot.

(Invited) The Novel Spin-on Hard Mask and Ultra Thin UL Material for EUVL

2014 ◽  
Vol 60 (1) ◽  
pp. 263-271
Author(s):  
R. Sakamoto ◽  
H. Yaguchi ◽  
S. Shigaki ◽  
S. Sassa ◽  
N. Fujitani ◽  
...  
Keyword(s):  
The Novel ◽  
Hard Mask

Review of STEP-NC Compliant System for Turn-Mill Operations

2011 ◽  
Vol 383-390 ◽  
pp. 2827-2831
Author(s):  
Yusri Yusof ◽  
Mohd Fahrurazi Mohd Nor
Keyword(s):  
Process Control ◽  
Process Planning ◽  
The Novel ◽  
Process Measurement ◽  
Computational Environment ◽  
Specific Focus ◽  
Manufacturing Features

Today with the latest technology the information beyond tool movement and switching instruction such as tooling, manufacturing features and process sequences are needed to support global adaptability for manufacturing with a specific focus on CNC-based manufacture This research focuses on the use of the new standard; ISO 14649 (STEP-NC), to address the process planning and machining of discrete turn/mill components and proposes a STEP Compliant NC structure for generation of ISO 14646 code which can be used for turned component manufacture. The novel application of this work is STEP-NC compliant process control where the research will utilise and extend the standard for in process measurement at the machine and also explore the application and integration of the STEP-NC standards. The major contribution of this research is the review of a computational environment for a STEPNC compliant system for turn/mill operations.

scholarly journals Machine learning based outlier detection for medical data

2021 ◽  
Vol 24 (1) ◽  
pp. 564
Author(s):  
R. Vijaya Kumar Reddy ◽  
Shaik Subhani ◽  
B. Srinivasa Rao ◽  
N. Lakshmipathi Anantha
Keyword(s):  
Machine Learning ◽  
Health Care ◽  
Outlier Detection ◽  
Health Care Industry ◽  
Work Load ◽  
Medical Data ◽  
The Novel ◽  
Cleaning Process ◽  
Care Industry ◽  
Global Data

<p>The concept of machine learning generate best results in health care data, it also reduce the work load of health care industry. This algorithm potentially overcome the issues and find out the novel knowledge for development of medical date in health care industry. In this paper propose a new algorithm for finding the outliers using different datasets. Considering that medical data are analytic of mutually health problems and an activity. The proposed algorithm is working based on supervised and unsupervised learning. This algorithm detects the outliers in medical data. The effectiveness of local and global data factor for outlier detection for medical data in real time. Whatever, the model used in this scenario from their training and testing of medical data. The cleaning process based on the complete attributes of dataset of similarity operations. Experiments are conducted in built in various medical datasets. The statistical outcome describe that the machine learning based outlier finding algorithm given that best accurateness.</p>

Applying online UV/Vis-spectrometry for process control of an ozonation step for advanced wastewater treatment

2013 ◽  
Vol 8 (2) ◽  
pp. 151-160
Author(s):  
H. Schaar ◽  
L. Kornfeind ◽  
S. Winkler ◽  
E. Saracevic ◽  
N. Kreuzinger
Keyword(s):  
Wastewater Treatment ◽  
Process Control ◽  
Relative Error ◽  
Organic Matrix ◽  
The Novel ◽  
Validation Data ◽  
Mean Relative Error ◽  
Novel Approach ◽  
Advanced Wastewater Treatment ◽  
Good Agreement

The ozonation of tertiary effluent for advanced wastewater treatment requires a comprehensive control strategy in order to guarantee stable, efficient and economic operation. In the present study the dissolved organic carbon (DOC) in the influent to the ozonation plant was selected as key control parameter and residual ozone in the effluent was included as a secondary control. The objective was to evaluate UV/Vis (ultraviolet-visible)-spectrometry for the calculation of equivalent concentrations for the control parameters DOC and ozone using cross-validated PLSR models. The results of the DOC model were in good agreement with the laboratory reference data. Eighty percent of the validation data had a relative error below 10%, while the mean relative error was 1.5%. Despite the interference of the organic matrix with ozone in the UV-range an independent ozone model was developed achieving a mean relative error of 5.6%. Based on the results obtained in this study, the novel approach of using UV/Vis-spectrometry for process control of effluent ozonation proved to have a high potential for practical application.

Rf glow discharge optical emission spectrometry for cleaning process control of oil residues in low alloy steel

2007 ◽  
Vol 22 (4) ◽  
pp. 411-414 ◽  
Author(s):  
Armando Menéndez ◽  
Rosario Pereiro ◽  
Nerea Bordel ◽  
Joseph McDermid ◽  
John Thomson ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Process Control ◽  
Alloy Steel ◽  
Optical Emission ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Cleaning Process ◽  
Low Alloy Steel ◽  
Rf Glow Discharge

Fuzzy Based Parameter Adaptation in ACO for Solving VRP

2019 ◽  
Vol 10 (2) ◽  
pp. 65-81 ◽  
Author(s):  
Sandhya ◽  
Rajiv Goel
Keyword(s):  
Vehicle Routing ◽  
Vehicle Routing Problem ◽  
Control Mechanism ◽  
Optimization Problems ◽  
Adaptive Strategies ◽  
Benchmark Problems ◽  
Parameter Control ◽  
Computational Results ◽  
Parameter Adaptation ◽  
Routing Problem

Ant Colony Optimization, a popular class of metaheuristics, have been widely applied for solving optimization problems like Vehicle Routing Problem. The performance of ACO is affected by the values of parameters used. However, in literature, few methods are proposed for parameter adaptation of ACO. In this article, a fuzzy-based parameter control mechanism for ACO has been developed. Three adaptive strategies FACO-1, FACO-2, FACO-3 are proposed for determining values of parameters alpha and beta, and evaporation factor separately as well as for all three parameters simultaneously. The performance of proposed strategies is compared with standard ACS on TSP and VRP benchmarks. Computational results on standard benchmark problems shows the effectiveness of the strategies.

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