Characterization of LiCoO[sub 2] Thin Film Cathodes Deposited by Liquid-Delivery Metallorganic Chemical Vapor Deposition for Rechargeable Lithium Batteries

2002 ◽  
Vol 149 (12) ◽  
pp. A1584 ◽  
Author(s):  
Sang-In Cho ◽  
Soon-Gil Yoon
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Lithium Batteries ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Rechargeable Lithium Batteries ◽  
Liquid Delivery

Preparation and Characterization of RuOxThin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition

2004 ◽  
Vol 43 (5A) ◽  
pp. 2667-2671 ◽  
Author(s):  
Kyoung-Won Kim ◽  
Nam-Soo Kim ◽  
Hyung-Gyoo Lee ◽  
Yeong-Seuk Kim ◽  
Hee-Jae Kang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Metalorganic Chemical ◽  
Liquid Delivery

Electrical and optical characterization of SiONC dielectric thin film deposited by polymer-source chemical vapor deposition

2007 ◽  
Vol 101 (8) ◽  
pp. 084107 ◽  
Author(s):  
El Hassane Oulachgar ◽  
Cetin Aktik ◽  
Mihai Scarlete ◽  
Starr Dostie ◽  
Rob Sowerby ◽  
...  
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Optical Characterization ◽  
Dielectric Thin Film
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