Electrical and optical characterization of SiONC dielectric thin film deposited by polymer-source chemical vapor deposition

Vapor Deposition ◽

Chemical Vapor ◽

Dielectric Thin Film

Characterization of Microcrystalline Silicon Thin Film Solar Cells Prepared by High Working Pressure Plasma-enhanced Chemical Vapor Deposition

2017 IEEE 44th Photovoltaic Specialist Conference (PVSC) ◽

10.1109/pvsc.2017.8366297 ◽

2017 ◽

Author(s):

Jung-Dae Kwon ◽

Dong-Ho Kim ◽

Ji-Hoon Lee ◽

Myungkwan Song ◽

Myunghun Shin

Keyword(s):

Thin Film ◽

Vapor Deposition ◽

Chemical Vapor ◽

Thin Film Solar Cells ◽

Microcrystalline Silicon ◽

Silicon Thin Film ◽

Working Pressure ◽

High Working Pressure

Metrology and Optical Characterization of Plasma Enhanced Chemical Vapor Deposition, (PECVD), low temperature deposited Amorphous Carbon films

10.1063/1.2799445 ◽

2007 ◽

Cited By ~ 1

Author(s):

F. Ferrieu ◽

C. Chaton ◽

D. Neira ◽

C. Beitia ◽

L. Proenca Mota ◽

...

Keyword(s):

Low Temperature ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Carbon Films ◽

Amorphous Carbon Films

Optical characterization of Si-rich silicon nitride films prepared by low pressure chemical vapor deposition

Microelectronics Reliability ◽

10.1016/j.microrel.2007.01.073 ◽

2007 ◽

Vol 47 (4-5) ◽

pp. 794-797 ◽

Cited By ~ 14

Author(s):

V.Em. Vamvakas ◽

N. Vourdas ◽

S. Gardelis

Keyword(s):

Silicon Nitride ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Silicon Nitride Films ◽

Pressure Chemical

Electrical Characterization of Silicon Dioxide Thin Film Prepared by ArF Excimer Laser Chemical Vapor Deposition from Silicon Tetraacetate

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.l150 ◽

1997 ◽

Vol 36 (Part 2, No. 2A) ◽

pp. L150-L153 ◽

Cited By ~ 2

Author(s):

Atsushi Maruyama ◽

Kazuhiro Nakata ◽

Ken Yukimura ◽

Toshiro Maruyama

Keyword(s):

Thin Film ◽

Silicon Dioxide ◽

Excimer Laser ◽

Vapor Deposition ◽

Electrical Characterization ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition ◽

Arf Excimer Laser

In situ optical characterization of structures grown by metal-organic chemical vapor deposition

Solar Cells ◽

10.1016/0379-6787(87)90160-8 ◽

1987 ◽

Vol 21 (1-4) ◽

pp. 456-457

Author(s):

J.M. Olson ◽

A. Kibbler

Keyword(s):

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Characterization of microcrystalline silicon thin film solar cells prepared by high working pressure plasma-enhanced chemical vapor deposition

Journal of Electroceramics ◽

10.1007/s10832-014-9929-x ◽

2014 ◽

Vol 33 (3-4) ◽

pp. 149-154 ◽

Cited By ~ 4

Author(s):

Sung-Do Lee ◽

Young-Joo Lee ◽

Kee-Seok Nam ◽

Yongsoo Jeong ◽

Dong-Ho Kim ◽

...

Keyword(s):

Thin Film ◽

Vapor Deposition ◽

Chemical Vapor ◽

Thin Film Solar Cells ◽

Microcrystalline Silicon ◽

Silicon Thin Film ◽

Working Pressure ◽

High Working Pressure

Real-time optical characterization of heteroepitaxy by organometallic chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.582323 ◽

2000 ◽

Vol 18 (4) ◽

pp. 1184-1189 ◽

Cited By ~ 14

Author(s):

K. A. Bell ◽

M. Ebert ◽

S. D. Yoo ◽

K. Flock ◽

D. E. Aspnes

Keyword(s):

Real Time ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organometallic Chemical Vapor Deposition

Characterization of m-plane ZnO thin film on γ-LiAlO2 (100) substrate by metal-organic chemical vapor deposition

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2007.12.021 ◽

2009 ◽

Vol 467 (1-2) ◽

pp. L8-L10 ◽

Cited By ~ 14

Author(s):

Hui Lin ◽

Shengming Zhou ◽

Taohua Huang ◽

Hao Teng ◽

Xuedong Liu ◽

...

Keyword(s):

Thin Film ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Zno Thin Film ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Characterization of LiCoO[sub 2] Thin Film Cathodes Deposited by Liquid-Delivery Metallorganic Chemical Vapor Deposition for Rechargeable Lithium Batteries

Journal of The Electrochemical Society ◽

10.1149/1.1517283 ◽

2002 ◽

Vol 149 (12) ◽

pp. A1584 ◽

Cited By ~ 35

Author(s):

Sang-In Cho ◽

Soon-Gil Yoon

Keyword(s):

Thin Film ◽

Lithium Batteries ◽

Vapor Deposition ◽

Chemical Vapor ◽

Rechargeable Lithium Batteries ◽

Liquid Delivery

Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition

Acta Universitaria ◽

10.15174/au.2014.623 ◽

2014 ◽

Vol 24 (4) ◽

pp. 21-26 ◽

Cited By ~ 3

Author(s):

J. A. Ocón-Arellanes ◽

J. G. Murillo-Ramírez ◽

P. Amézaga-Madrid ◽

M. Miki-Yoshida

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Chemical Vapor ◽

Optical Characterization