Effect of Surface Reactive Site Density and Reactivity on the Growth of Atomic Layer Deposited WN[sub x]C[sub y] Films
2006 ◽
Vol 9
(7)
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pp. F64
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2015 ◽
Vol 33
(5)
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pp. 05E117
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1997 ◽
Vol 75
(6)
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pp. 1080-1089
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2017 ◽
Vol 146
(5)
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pp. 052811
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Keyword(s):
2014 ◽
Vol 53
(8S1)
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pp. 08LC04
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Keyword(s):
Keyword(s):
2020 ◽
Vol 56
(5)
◽
pp. 492-497
Keyword(s):