Effect of surface pretreatment on interfacial chemical bonding states of atomic layer deposited ZrO2 on AlGaN
2015 ◽
Vol 33
(5)
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pp. 05E117
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2014 ◽
Vol 53
(8S1)
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pp. 08LC04
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2007 ◽
Vol 202
(3)
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pp. 532-537
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2019 ◽
Vol 16
(6)
◽
pp. 1751-1756
2020 ◽
Vol 745
◽
pp. 012058
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