Electrical Properties and Thermal Stabilities of HfZrOx by Atomic Layer Deposition Technique for ULSI Application

2019 ◽  
Vol 3 (15) ◽  
pp. 99-105 ◽  
Author(s):  
You Min Jung ◽  
Sang Jin Lee ◽  
Ki Hoon Lee ◽  
Sang Kyu Lee ◽  
Tea Wook Seo
Keyword(s):  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Technique ◽  
Thermal Stabilities ◽  
Layer Deposition ◽  
Atomic Layer Deposition Technique

Antimicrobial coatings grown by the atomic layer deposition technique

2015 ◽  
Author(s):  
Lukasz Wachnicki ◽  
Sylwia Gieraltowska ◽  
Bartlomiej S. Witkowski ◽  
Marek Godlewski ◽  
Michal M. Godlewski ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Technique ◽  
Antimicrobial Coatings ◽  
Layer Deposition ◽  
Atomic Layer Deposition Technique

Improvement in Al2O3 dielectric behavior by using ozone as an oxidant for the atomic layer deposition technique

2002 ◽  
Vol 92 (11) ◽  
pp. 6739-6742 ◽  
Author(s):  
J. B. Kim ◽  
D. R. Kwon ◽  
K. Chakrabarti ◽  
Chongmu Lee ◽  
K. Y. Oh ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dielectric Behavior ◽  
Deposition Technique ◽  
Layer Deposition ◽  
Atomic Layer Deposition Technique

Enhanced thermal degradation stability of the Sr2Si5N8:Eu2+ phosphor by ultra-thin Al2O3 coating through the atomic layer deposition technique in a fluidized bed reactor

2019 ◽  
Vol 7 (19) ◽  
pp. 5772-5781 ◽  
Author(s):  
Yujie Zhao ◽  
Liangjun Yin ◽  
O. M. ten Kate ◽  
Benjamin Dierre ◽  
Ruben Abellon ◽  
...  
Keyword(s):  
Thermal Degradation ◽  
Atomic Layer Deposition ◽  
Fluidized Bed ◽  
Atomic Layer ◽  
Fluidized Bed Reactor ◽  
Al2o3 Coating ◽  
Deposition Technique ◽  
Layer Deposition ◽  
Atomic Layer Deposition Technique

Enhanced thermal degradation stability of the Sr2Si5N8:Eu2+ phosphor by ultra-thin Al2O3 coating through FB-ALD.

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