Structural and electrical properties of TixAl1−xOy thin films grown by atomic layer deposition
2011 ◽
Vol 29
(1)
◽
pp. 01A302
◽
2012 ◽
Vol 47
(3)
◽
pp. 790-793
◽
2018 ◽
Vol 53
(21)
◽
pp. 15237-15245
◽
2019 ◽
Vol 97
◽
pp. 35-39
◽
2008 ◽
Vol 155
(10)
◽
pp. H738
◽
2002 ◽
Vol 193
(1-4)
◽
pp. 120-128
◽
Enhanced Electrical Properties of SrTiO3 Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
2011 ◽
Vol 14
(10)
◽
pp. G45
◽
Keyword(s):
Keyword(s):