Scanning Probe Microscopy Imaging of Nucleation and Electronic Structure Passivation during Atomic Layer Deposition on a Compound Semiconductor Surface

2010 ◽  
Vol 133 (15) ◽  
pp. 154704 ◽  
Author(s):  
Jonathon B. Clemens ◽  
Evgueni A. Chagarov ◽  
Martin Holland ◽  
Ravi Droopad ◽  
Jian Shen ◽  
...  

2012 ◽  
Vol 85 (3) ◽  
Author(s):  
D. Stöffler ◽  
S. Fostner ◽  
P. Grütter ◽  
R. Hoffmann-Vogel

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