Surface and Ultra-Thin Film Characterization by Grazing-Incidence Asymmetric Bragg Diffraction

AbstractAn effective technique using grazing-incidence X-rays and asymmetric-Bragg diffraction (GIABD) for the characterization of crystalline phases on surfaces and structural depth-profiles in thin films is described. The application of the GIABD using both X-ray and synchrotron radiation sources for the analysis of an iron-oxide magnetic thin film previously reported to have an unexpected magnetically-dead layer is discussed. The X-ray diffraction analysis using the GIABD and the conventional θ-2θ scanning techniques detected an anti-ferromagnetic hexagonal α-Fe2O3 on the surface and a ferromagnetic tetragonal γ-Fe2O3 in the bulk of the film, respectively. The synchrotron diffraction analysis using incident angles below and above the critical angle of total reflection quantitatively determined the structural depth-profiles of α-Fe2O3 and γ-Fe2O3 in the film.

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Study of a chemical-vapor-deposited diamond thin film on a molybdenum substrate by glancing incidence X-ray diffraction

Powder Diffraction ◽

10.1154/1.2790933 ◽

2007 ◽

Vol 22 (4) ◽

pp. 319-323 ◽

Cited By ~ 1

Author(s):

Jianfeng Fang ◽

Jing Huo ◽

Jinyuan Zhang ◽

Yi Zheng

Keyword(s):

Thin Film ◽

Diffraction Analysis ◽

Transition Layer ◽

Chemical Vapor ◽

Grazing Incidence ◽

X Ray Diffraction ◽

X Ray ◽

Diamond Thin Film ◽

Chemical Vapor Deposited

The structure of a chemical-vapor-deposited (CVD) diamond thin film on a Mo substrate was studied using quasi-parallel X-ray and glancing incidence techniques. Conventional X-ray diffraction analysis revealed that the sample consists of a diamond thin film, a Mo2C transition layer, and Mo substrate. The Mo2C transition layer was formed by a chemical reaction between the diamond film and the Mo substrate during the CVD process. A method for layer-thickness determination of the thin film and the transition layer was developed. This method was based on a relationship between X-ray diffraction intensities from the transition layer or its substrate and a function of grazing incidence angles. Results of glancing incidence X-ray diffraction analysis showed that thicknesses of the diamond thin film and the Mo2C transition layer were determined successfully with high precision.

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Depth Profiling of Cu(In,Ga)Se2 by Grazing Incidence X-ray Diffraction

MRS Proceedings ◽

10.1557/proc-763-b6.2 ◽

2003 ◽

Vol 763 ◽

Cited By ~ 3

Author(s):

I.M. Kötschau ◽

G. Bilger ◽

H.W. Schock

Keyword(s):

Thin Film ◽

Depth Profile ◽

Secondary Ion Mass Spectrometry ◽

Depth Profiling ◽

Grazing Incidence ◽

Strong Impact ◽

X Ray Diffraction ◽

Typical Application ◽

X Ray ◽

Depth Profiles

AbstractGrazing incidence X-ray diffraction (GIXRD) in conjunction with a layer absorption modeling algorithm is a powerful tool for studying the structural properties of polycrystaline thin films. A typical application is the refinement of compositional depth profiles. Of genera interest are the depth profile of the Ga/(In+Ga)-ratio over the entire thickness of the thin film, as well as the depth profile of th Cu/(In+Ga)-ratio near the surface. In this respect the three stage process is a particular interesting deposition technique. A remarkable recrystalization of the entire thin film at the end of the second stage has a strong impact on Ga-gradients as well as on the Cu-depletion close to the surface. In this contribution we use the GIXRD technique to refine composititional depth profiles obtained by secondary ion mass spectrometry (SIMS). We demonstrate that structura changes near the surface due to the recrystalization can be monitored. In addition we are able measure the depth of a Cu-depleted surface layer with high accuracy.

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New developments including X-ray standing waves in the dynamical Bragg diffraction program of X-ray Server

Journal of Applied Crystallography ◽

10.1107/s160057672100830x ◽

2021 ◽

Vol 54 (5) ◽

pp. 1530-1534

Author(s):

Sergey Stepanov

Keyword(s):

Standing Waves ◽

Grazing Incidence ◽

Bragg Diffraction ◽

Use Cases ◽

X Ray Diffraction ◽

New Developments ◽

Dynamical Diffraction ◽

X Ray

X-ray Server (https://x-server.gmca.aps.anl.gov) is a collection of programs for online modelling of X-ray diffraction and scattering. The dynamical diffraction program is the second most popular Server program, contributing 34% of total Server usage. It models dynamical X-ray diffraction from strained crystals and multilayers for any Bragg-case geometry including grazing incidence and exit. This paper reports on a revision of equations used by the program, which yields ten times faster calculations in most use cases, on implementing calculations of X-ray standing waves and on adding new options for modelling diffraction from monolayers.

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X-RAY DIFFRACTION FOR SURFACES AND BURIED INTERFACES

Surface Review and Letters ◽

10.1142/s0218625x00000452 ◽

2000 ◽

Vol 07 (04) ◽

pp. 437-446 ◽

Cited By ~ 1

Author(s):

G. RENAUD

Keyword(s):

Grazing Incidence ◽

X Rays ◽

X Ray Diffraction ◽

X Ray ◽

Grain Sizes ◽

Buried Interfaces ◽

Surfaces And Interfaces ◽

Coherent Interfaces

The application of X-rays to the structural characterization of surfaces and interfaces, in situ and in UHV, is discussed on selected examples. Grazing incidence X-ray diffraction is not only a very powerful technique for quantitatively investigating the atomic structure of surfaces and interfaces, but is also very useful for providing information on the interfacial registry for coherent interfaces or on the strain deformation, island and grain sizes for incoherent epilayers.

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X-ray diffraction analysis of YBaCuO ultra-thin film growth

Journal of Alloys and Compounds ◽

10.1016/s0925-8388(96)02770-3 ◽

1997 ◽

Vol 251 (1-2) ◽

pp. 65-69 ◽

Cited By ~ 2

Author(s):

G. Linker ◽

D. Hüttner ◽

O. Meyer ◽

M. Ohkubo ◽

J. Reiner

Keyword(s):

Thin Film ◽

Diffraction Analysis ◽

Film Growth ◽

Thin Film Growth ◽

X Ray Diffraction ◽

X Ray ◽

Ultra Thin Film

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Appendix 12: X-Ray Diffraction Analysis of Thin-Film Residual Stresses

Glass ◽

10.1002/9783527617029.app12 ◽

2007 ◽

pp. 335-339

Keyword(s):

Thin Film ◽

Residual Stresses ◽

Diffraction Analysis ◽

X Ray Diffraction ◽

X Ray

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Energy Dispersive Grazing Incidence X-ray Diffraction Study on Organic Thin Films EpitaxiaHy Grown on Crystalline Substrate

Advances in X-ray Analysis ◽

10.1154/s0376030800023090 ◽

1995 ◽

Vol 39 ◽

pp. 659-664 ◽

Cited By ~ 1

Author(s):

Kenji Ishida ◽

Akinori Kita ◽

Kouichi Hayashi ◽

Toshihisa Horiuchi ◽

Shoichi Kal ◽

...

Keyword(s):

Thin Film ◽

Thin Films ◽

Film Studies ◽

Organic Thin Films ◽

Grazing Incidence ◽

X Ray Diffraction ◽

X Ray ◽

Structural Evaluation ◽

Crystalline Substrate ◽

Scattering Volume

Thin film technology is rapidly evolving today, and the characterization of the thin film and its surface have become very important issue not only from scientific but also technological viewpoints. Although x-ray diffraction measurements have been used as suitable evaluation methods in crystallography studies, its application to the structural evaluation of the thin films, especially organic one having the low electron densities, is not easy due to the small amounts of scattering volume and the high obstructive scattering noise from the substrate. However, the x-ray diffraction measurements under grazing incidence will aid not only in overcoming the such problems but also in analyzing in-plane structure of the thin films. Therefore, so-called grazing incidence x-ray diffraction (GIXD) has been recognized as one of the most powerful tools for the surface and thin film studies.

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