Most of the micro/nano manipulation mechanisms and systems are commonly based on flexure-based monolithic structures, and are generally driven by piezoelectric actuators. In the presented work, experimental system identification, 1-DOF trajectory tracking with feed-forward control, and hysteresis compensation are investigated. An experimental research facility with laser interferometry-based sensing and measurement technique is established. System identification experiments were performed on a 2-DOF flexure-based mechanism to investigate its dynamics. The system identification procedure, experimental design, data acquisition, analysis and validation of the identified system are presented in details. A linear sine swept signal is applied to the system as an input and the corresponding response of the system is measured with laser interferometry-based sensing and measurement technique. The experimental results are used to evaluate the transfer function and the first natural frequency of the system in the X and Y axes. Experimental validation data is used to verify the accuracy of the identified model. Further, a feed-forward controller is established to track a 1-DOF smooth multiple-frequency trajectory. For hysteresis compensation, inverse PI (Prandtl–Ishlinskii) model is derived from classical PI model. The parameters of the inverse PI model is estimated and validated with the experimental data. Finally, inverse PI model is directly adopted as a feed-forward controller for hysteresis compensation of piezoelectric actuators.
Feedforward Control of Gear Mesh Vibration Using Piezoelectric Actuators
