In-Situ Synchrotron Radiation Photoemission Spectroscopy Study of the Initial Atomic Layer Deposition of Al2O3 Film on Si(001) Substrate

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2011.3629 ◽

2011 ◽

Vol 11 (5) ◽

pp. 4328-4332 ◽

Author(s):

S. H. Kim ◽

B. K. Lee ◽

J. Baik ◽

C. Jeon ◽

S. S. Lee ◽

...

Keyword(s):

Synchrotron Radiation ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Photoemission Spectroscopy ◽

Spectroscopy Study ◽

Layer Deposition ◽

Synchrotron Radiation Photoemission

Download Full-text

Initial reactions of ultrathin HfO2 films by in situ atomic layer deposition: An in situ synchrotron photoemission spectroscopy study

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5015946 ◽

2018 ◽

Vol 36 (2) ◽

pp. 02D402

Author(s):

Seok Hwan Kim ◽

Wooseok Song ◽

In Su Jeon ◽

Sun Sook Lee ◽

Taek-Mo Chung ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Photoemission Spectroscopy ◽

Spectroscopy Study ◽

Layer Deposition

Download Full-text

In situ atomic layer deposition and synchrotron-radiation photoemission study of Al2O3 on pristine n-GaAs(001)-4×6 surface

Microelectronic Engineering ◽

10.1016/j.mee.2011.03.064 ◽

2011 ◽

Vol 88 (7) ◽

pp. 1101-1104 ◽

Author(s):

Y.H. Chang ◽

M.L. Huang ◽

P. Chang ◽

J.Y. Shen ◽

B.R. Chen ◽

...

Keyword(s):

Synchrotron Radiation ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

Photoemission Study ◽

Synchrotron Radiation Photoemission

Download Full-text

The initial atomic layer deposition of HfO2∕Si(001) as followed in situ by synchrotron radiation photoelectron spectroscopy

Journal of Applied Physics ◽

10.1063/1.2978362 ◽

2008 ◽

Vol 104 (6) ◽

pp. 064116 ◽

Author(s):

Massimo Tallarida ◽

Konstantin Karavaev ◽

Dieter Schmeisser

Keyword(s):

Synchrotron Radiation ◽

Atomic Layer Deposition ◽

Photoelectron Spectroscopy ◽

Atomic Layer ◽

Layer Deposition

Download Full-text

In situ infrared spectroscopy study of the interface self-cleaning during the atomic layer deposition of HfO2 on GaAs(100) surfaces

Applied Physics Letters ◽

10.1063/1.4896501 ◽

2014 ◽

Vol 105 (12) ◽

pp. 121604 ◽

Author(s):

Liwang Ye ◽

Theodosia Gougousi

Keyword(s):

Infrared Spectroscopy ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Spectroscopy Study ◽

Layer Deposition ◽

Self Cleaning ◽

In Situ Infrared Spectroscopy

Download Full-text

In-situX-ray Photoemission Spectroscopy Study of Atomic Layer Deposition of TiO2on Silicon Substrate

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.031102 ◽

2012 ◽

Vol 51 (3R) ◽

pp. 031102 ◽

Author(s):

Seung Youb Lee ◽

Cheolho Jeon ◽

Seok Hwan Kim ◽

Yooseok Kim ◽

Woosung Jung ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Silicon Substrate ◽

Atomic Layer ◽

Photoemission Spectroscopy ◽

Spectroscopy Study ◽

Layer Deposition

Download Full-text

In Situ Auger Electron Spectroscopy Study of Atomic Layer Deposition: Growth Initiation and Interface Formation Reactions during Ruthenium ALD on Si−H, SiO2, and HfO2Surfaces

Langmuir ◽

10.1021/la061898u ◽

2007 ◽

Vol 23 (11) ◽

pp. 6106-6112 ◽

Author(s):

Kie Jin Park ◽

David B. Terry ◽

S. Michael Stewart ◽

Gregory N. Parsons

Keyword(s):

Atomic Layer Deposition ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Atomic Layer ◽

Spectroscopy Study ◽

Interface Formation ◽

Layer Deposition ◽

Growth Initiation

Download Full-text

In-situ Synchrotron Radiation X-ray Scattering Study On The Initial Structure Of Atomic Layer Deposition

10.1063/1.3666330 ◽

2011 ◽

Author(s):

Y. J. Park ◽

D. R. Lee ◽

S. Baik ◽

Jisoon Ihm ◽

Hyeonsik Cheong

Keyword(s):

Synchrotron Radiation ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Initial Structure ◽

X Ray ◽

X Ray Scattering ◽

Layer Deposition ◽

Scattering Study ◽

Download Full-text

Synchrotron radiation photoemission study of interfacial electronic structure of HfO2 on In0.53Ga0.47As(001)-4 × 2 from atomic layer deposition

Applied Physics Letters ◽

10.1063/1.4863440 ◽

2014 ◽

Vol 104 (4) ◽

pp. 042904 ◽

Author(s):

G. K. Wertheim

Keyword(s):

Electronic Structure ◽

Synchrotron Radiation ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Interfacial Electronic Structure ◽

Layer Deposition ◽

Photoemission Study ◽

Synchrotron Radiation Photoemission

Download Full-text

Atom-to-atom interactions for atomic layer deposition of trimethylaluminum on Ga-rich GaAs(001)-4 × 6 and As-rich GaAs(001)-2 × 4 surfaces: a synchrotron radiation photoemission study

Nanoscale Research Letters ◽

10.1186/1556-276x-8-169 ◽

2013 ◽

Vol 8 (1) ◽

Author(s):

Tun-Wen Pi ◽

Hsiao-Yu Lin ◽

Ya-Ting Liu ◽

Tsung-Da Lin ◽

Gunther K Wertheim ◽

...

Keyword(s):

Synchrotron Radiation ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

Photoemission Study ◽

Synchrotron Radiation Photoemission

Download Full-text

In-situX-ray Photoemission Spectroscopy Study of Atomic Layer Deposition of TiO$_{2}$ on Silicon Substrate

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.031102 ◽

2012 ◽

Vol 51 ◽

pp. 031102 ◽

Author(s):

Seung Youb Lee ◽

Cheolho Jeon ◽

Seok Hwan Kim ◽

Yooseok Kim ◽

Woosung Jung ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Silicon Substrate ◽

Atomic Layer ◽

Photoemission Spectroscopy ◽

Spectroscopy Study ◽

Layer Deposition

Download Full-text