In-situX-ray Photoemission Spectroscopy Study of Atomic Layer Deposition of TiO$_{2}$ on Silicon Substrate
2012 ◽
Vol 51
◽
pp. 031102
◽
In-situX-ray Photoemission Spectroscopy Study of Atomic Layer Deposition of TiO2on Silicon Substrate
2012 ◽
Vol 51
(3R)
◽
pp. 031102
◽
2018 ◽
Vol 36
(2)
◽
pp. 02D402
Keyword(s):
2011 ◽
Vol 11
(5)
◽
pp. 4328-4332
◽
2018 ◽
Vol 36
(2)
◽
pp. 02D401
◽
Keyword(s):
2018 ◽
Vol 12
(3)
◽
pp. 1700437
◽