P-CVM / CMP fusion processing of CVD polycrystalline SiC with ELID grinding for preprocessing
2021 ◽
Vol 2021.74
(0)
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pp. F43
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2016 ◽
Vol 86
(5-8)
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pp. 1165-1171
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2012 ◽
Vol 217-219
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pp. 1642-1645
2012 ◽
Vol 6
(6)
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pp. 504-511
2008 ◽
Vol 1
(3/4)
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pp. 274
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2005 ◽
Vol 291-292
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pp. 115-120
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2007 ◽
Vol 47
(3-4)
◽
pp. 529-536
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2010 ◽
Vol 24
(15n16)
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pp. 3005-3010
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