310 Straightness error measurement of an ultra-precision aspheric grinding machine : Straightness and rolling error measurement of slide table

2004 ◽  
Vol 2004.39 (0) ◽  
pp. 110-111
Author(s):  
Yoshikazu ARAI ◽  
Wei GAO ◽  
Hiroki SHIMIZU ◽  
Satoshi KIYONO ◽  
Tsunemoto KURIYAGAWA
Keyword(s):  
Error Measurement ◽  
Ultra Precision ◽  
Grinding Machine ◽  
Straightness Error

Straightness Error Measurement of an Ultra-precision Aspheric Grinding Machine (2nd report) : On-machine Experiments

2004 ◽  
Vol 2004.4 (0) ◽  
pp. 315-316
Author(s):  
Yoshikazu ARAI ◽  
Wei GAO ◽  
Hiroki SHIMIZU ◽  
Satoshi KIYONO ◽  
Tsunemoto KURIYAGAWA
Keyword(s):  
Error Measurement ◽  
Ultra Precision ◽  
Grinding Machine ◽  
Straightness Error

Straightness-Error Measurement with Laterally Modulated Polarized Light

2009 ◽  
Vol 29 (4) ◽  
pp. 955-959
Author(s):  
朱凌建 Zhu Lingjian ◽  
李照锁 Li Zhaosuo ◽  
刘君华 Liu Junhua ◽  
张钟华 Zhang Zhonghua
Keyword(s):  
Polarized Light ◽  
Error Measurement ◽  
Straightness Error

scholarly journals A “Double Accuracy Theory” and Experimental Research on Precision Grinding

2020 ◽  
Vol 10 (6) ◽  
pp. 2030
Author(s):  
Lai Hu ◽  
Yipeng Li ◽  
Jun Zha ◽  
Yaolong Chen
Keyword(s):  
High Speed ◽  
Coordinate Measuring Machine ◽  
Precision Grinding ◽  
Machined Parts ◽  
Accuracy Theory ◽  
Machine Theory ◽  
Ultra Precision ◽  
Measuring Machine ◽  
Grinding Machine ◽  
Multi Body

In the global machining industry, ultra-precision/ultra-high-speed machining has become a challenge, and its requirements are getting higher and higher. The challenge of precision grinding lies in the difficulty in ensuring the various dimensions and geometric accuracy of the final machined parts. This paper mainly uses the theory of a multi-body system to propose a “double accuracy” theory of manufacturing and measurement. Firstly, the grinding theory with an accuracy of 0.1 μm and the precision three-coordinate measuring machine theory with an accuracy of 0.3 μm are deduced. Secondly, the two theories are analyzed. Aiming to better explain the practicability of the “double accuracy” theory, a batch of motorized spindle parts is processed by a grinding machine. Then the precision three-coordinate measuring machine is used to measure the shape and position tolerances such as the roundness, the squareness, the flatness, and the coaxiality. The results show that the reached roundness of part A and B is 5 μm and 0.5 μm, the squareness is 3 μm and 4.5 μm, and the coaxiality tolerance is 1.2 μm, respectively.

Measurement of Five DOF Motion Errors in the Ultra Precision Feed Tables

2006 ◽  
Vol 505-507 ◽  
pp. 187-192 ◽  
Author(s):  
Yoon Jin Oh ◽  
Chun Hong Park ◽  
J.H. Hwang ◽  
Deug Woo Lee
Keyword(s):  
Degrees Of Freedom ◽  
Laser Interferometer ◽  
Point Method ◽  
Straight Edge ◽  
Roll Motion ◽  
Error Measurement ◽  
Linear Motion ◽  
Pitch Motion ◽  
Ultra Precision ◽  
Measuring Scheme

Five degrees-of-freedom (DOF) motion errors of an ultra precision feed table were measured in this study. The laser interferometer was used to measure the yaw and pitch errors and the reversal method was used for the roll error measurement. The linear motion errors in the vertical and horizontal directions were measured using the sequential two point method. The influence of angular motion errors on the linear motion errors while applying the sequential two point method was compensated with the data from the laser interferometer and the reversal method. Capacitive type sensors and an optical straight edge were used while applying the reversal method and the sequential two point method. To demonstrate the effectiveness of our measuring scheme for the ultra precision feed tables, five DOF motion errors of a hydrostatic table driven by a linear motor were measured and presented. From the measured repeatabilities of 5 DOF error motions, it was estimated that the measuring accuracies were ±0.02 μm for the horizontal and vertical linear motion, ±0.04 arcsec for yaw motion, ±0.05 arcsec for pitch motion and ±0.02 arcsec for roll motion.

Structural Analysis of a Grinding Machine with Linear Motion Guide Applied

2013 ◽  
Vol 336-338 ◽  
pp. 1014-1019
Author(s):  
Seon Yeol Oh ◽  
Han Seok Bang ◽  
B. Y. Choi ◽  
Woo Chun Choi ◽  
S. J. Cho
Keyword(s):  
Finite Element ◽  
Structural Analysis ◽  
Structural Design ◽  
Element Model ◽  
Linear Motion ◽  
Precision Grinding ◽  
Base Side ◽  
Ultra Precision ◽  
Linear Motion Guide ◽  
Grinding Machine

A finite element model of an ultra-precision grinding machine that can have high precision and high stiffness is constructed and structural analysis is done with equivalent stiffnesses of linear motion guides by after structural design and the deformation of the grinding machine is obtained. In order to reduce the deformation of the grinding machine that causes bad influence, structural complement is conducted by adding ribs at the lower part of the column. Also, the straightness of the grinding machine is improved by lifting that the base side of the column.

Straightness Apparatus in the Automatic Control Design Deep Hole

2011 ◽  
Vol 130-134 ◽  
pp. 684-686
Author(s):  
Liu Yan Shu ◽  
Yan Pin Ning
Keyword(s):  
Automatic Control ◽  
Measurement Method ◽  
Control Design ◽  
Error Measurement ◽  
Deep Hole ◽  
Straightness Error

In this paper, the instrument is designed by basing on principle of the measurement method of straightness error measurement of deep hole, the design technologies of A/D converters, automatic control and computer are used. The instrument can automatically acquire data, the process of acquire data is convenient, fast, safe and the data is reliable.

Ultra Precision Grinding of Wafer Scale

2012 ◽  
Vol 516 ◽  
pp. 257-262
Author(s):  
Martin Hünten ◽  
Fritz Klocke ◽  
Olaf Dambon ◽  
Benjamin Bulla
Keyword(s):  
Tungsten Carbide ◽  
Surface Topography ◽  
Precision Grinding ◽  
Wafer Scale ◽  
Advantages And Disadvantages ◽  
Grinding Processes ◽  
Ultra Precision ◽  
Grinding Tool ◽  
Glass Optics ◽  
Grinding Machine

Manufacturing moulds for the wafer-scale replication of precision glass optics sets new demands in terms of grinding tool lifetime and the processes to be applied. This paper will present different approaches to grinding processes and kinematics to machine wafer-scale tungsten carbide moulds with diameters of up to 100 mm and more than 100 single aspheric cavities, each featuring form accuracies in the micron range. The development of these processes will be described and advantages and disadvantages of the approaches derived from practical tests performed on an ultra precision grinding machine (Moore Nanotech 350FG) will be discussed. Finally, a comparison between the developed processes is made where achieved form accuracies and surface topography are analyzed.

A Study on the Optimum Condition Selection of Rotary Dressing System of Ultra-Precision Centerless Grinding Machine for Ferrule

2005 ◽  
Vol 291-292 ◽  
pp. 189-194 ◽  
Author(s):  
Eun Sang Lee ◽  
Y.-J. Chun ◽  
Nam Kyung Kim
Keyword(s):  
Optimum Condition ◽  
Hall Sensor ◽  
Depth Of Cut ◽  
Grinding Wheel ◽  
Rotating Speed ◽  
Ultra Precision ◽  
Sensor Signals ◽  
Centerless Grinding ◽  
Grinding Machine ◽  
Selection Of

The optimum condition selection of rotary dressing operations using Hall and AE sensor is presented. The acquired current signals from a hall sensor were studied as one of the method to obtain the optimum condition of dressing and the correlations between dressing condition and AE signals were also evaluated with the root mean square (RMS). Dressing operation was performed to investigate the effects of depth of cut, rotating speed and coolant. In order to verify the optimum condition of dressing, AE and hall sensor signals were compared in RMS with the surface micrograph of grinding wheel. This verification experiment demonstrates the effective dressing condition selection for centerless grinding.

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