Development of a trench depth measurement system for VLSI dynamic random access memory vertical capacitor cells using an interferometric technique with a Michelson interferometer
2013 ◽
Vol 25
(10)
◽
pp. 2699-2704
Keyword(s):
1996 ◽
Vol 35
(Part 1, No. 2B)
◽
pp. 1086-1089
◽
1996 ◽
Vol 35
(Part 1, No. 9B)
◽
pp. 4976-4979
◽
2021 ◽
Vol 21
(8)
◽
pp. 4216-4222
2004 ◽
Vol 43
(5A)
◽
pp. 2457-2461
◽
1998 ◽
Vol 45
(6)
◽
pp. 1300-1309
◽
Keyword(s):
Keyword(s):