Simulation comparisons of monitoring strategies in narrow bandpass filters and antireflection coatings

2013 ◽  
Vol 53 (4) ◽  
pp. A27 ◽  
Author(s):  
Ronald R. Willey
2009 ◽  
Vol 48 (9) ◽  
pp. 1727 ◽  
Author(s):  
Adriana Szeghalmi ◽  
Michael Helgert ◽  
Robert Brunner ◽  
Frank Heyroth ◽  
Ulrich Gösele ◽  
...  

2009 ◽  
Vol E92-C (3) ◽  
pp. 288-295
Author(s):  
Kazunori YAMANAKA ◽  
Kazuaki KURIHARA ◽  
Akihiko AKASEGAWA ◽  
Masatoshi ISHII ◽  
Teru NAKANISHI

2002 ◽  
Vol 57 (12) ◽  
pp. 6
Author(s):  
I. V. Korotash ◽  
M. Lorenz ◽  
E.M. Rudenko ◽  
T.V. Stepanova

Author(s):  
Brennan Davis ◽  
Wilson Chi

Abstract The use of an antireflection coating for backside semiconductor failure analysis is discussed. The process of selecting an appropriate coating is described. Several known coatings are also described in regards to imaging quality, material properties, and the benefits to device analysis applications.


Sign in / Sign up

Export Citation Format

Share Document