Three Dimensional Silicon Optical Waveguide Structure Bent by Ion Implantation for Surface Coupling
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2007 ◽
Vol 21
(30)
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pp. 5075-5089
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2019 ◽
Vol 552
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pp. 209-213
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1979 ◽
Vol 67
(10)
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pp. 1455-1456
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1992 ◽
Vol 75
(10)
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pp. 57-66
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