Abstract
This paper presents a technique to fabricate MEMS from a novel, optically transparent polysilazane material. Polysilazane is a hybrid organic/inorganic polymeric glass that is highly transparent in the infrared to ultraviolet range and exhibits thermal stability superior to that of organic glasses such as polycarbonate and PMMA at temperatures up to 230 °C without losing optical transparency. In addition, the UV absorption of the polysilazane is closer to that of silicate glass than to pure organic polymeric glasses. This paper is the first reported work on fabricating MEMS out of this novel material, which has many potential applications in optical MEMS. The fabrication process based on casting in micro molds made photolithographically from SU8 photoresist is described, and a fundamental study of the cure depth of the polysilazane is reported. A polysilazane phase transmission grating is fabricated and demonstrated as a proof of concept optical device.