scholarly journals In-Depth Practical Study of Length Metrology With Laser Interferometers Applying Different Techniques

2020 ◽  
Vol 7 (2) ◽  
pp. 36-42
Author(s):  
Ihab H Naeim
2016 ◽  
Author(s):  
Alberto Donazzan ◽  
Giampiero Naletto ◽  
Maria G. Pelizzo ◽  
Davide Cuccato ◽  
Alessandro Beghi ◽  
...  

2018 ◽  
Vol 18 (18) ◽  
pp. 7414-7420 ◽  
Author(s):  
German Fernandez Barranco ◽  
Benjamin S. Sheard ◽  
Christian Dahl ◽  
Wolfgang Mathis ◽  
Gerhard Heinzel

2016 ◽  
Vol 59 (3) ◽  
pp. 481-482 ◽  
Author(s):  
S. G. Dolgikh ◽  
S. S. Budrin ◽  
A. A. Plotnikov

2005 ◽  
Vol 295-296 ◽  
pp. 107-112 ◽  
Author(s):  
H.Z. Liu ◽  
Bing Heng Lu ◽  
Y.C. Ding ◽  
D.C. Li ◽  
Yi Ping Tang ◽  
...  

A precision 6-degree-of-freedom measurement system has been developed for simultaneous on-line measurements of imprint lithography stage. To successfully accomplish nanometer-scale pattern transfer from mold to resist film on the wafer, two types of positioning methods, static and dynamic, are used in this system. Two laser interferometers, two optical reflection mirrors and special structure on the stage with 3 elastic tracks are employed in this system to detect the positions and rotations of the stage. Through an algorithm, measurements of pitch, yaw and roll motions can be achieved. This system can realize on-line position detecting. Based on adjusting of PZTs, the detecting precision can reach 10nm and ±3 milli-arcsec, respectively. The measuring range can reach 100mm and ±10 arcsec, respectively.


1998 ◽  
Vol 20 (2) ◽  
pp. 103-112 ◽  
Author(s):  
H. Wen ◽  
D.G. Wiesler ◽  
A. Tveten ◽  
B. Danver ◽  
A. Dandridge

This paper presents several designs of high-sensitivity, compact fiber-optic ultrasound sensors that may be used for medical imaging applications. These sensors translate ultrasonic pulses into strains in single-mode optical fibers, which are measured with fiber-based laser interferometers at high precision. The sensors are simpler and less expensive to make than piezoelectric sensors, and are not susceptible to electromagnetic interference. It is possible to make focal sensors with these designs, and several schemes are discussed. Because of the minimum bending radius of optical fibers, the designs are suitable for single element sensors rather than for arrays.


2018 ◽  
Vol 97 (4) ◽  
Author(s):  
Ben Thorne ◽  
Tomohiro Fujita ◽  
Masashi Hazumi ◽  
Nobuhiko Katayama ◽  
Eiichiro Komatsu ◽  
...  

1990 ◽  
Vol 56 (2) ◽  
pp. 381-387
Author(s):  
Norimitsu OZAWA ◽  
Yutaka KITAMURA ◽  
Tsuguo KOHNO ◽  
Kimiyuki MITSUI ◽  
Yuichi OKAZAKI

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