Experimental Study on the Effect of Different Noble Gas Admixtures on the Gas Temperature of Oxygen Plasma

2005 ◽  
Vol 8 (1) ◽  
Author(s):  
K. Naoi ◽  
T. Sakamoto ◽  
H. Matsuura ◽  
H. Akatsuka
Keyword(s):  
Oxygen Plasma ◽  
Rotational Temperature ◽  
Noble Gas ◽  
Optical Emission ◽  
Radiative Transition ◽  
Band Spectrum ◽  
Gas Temperature ◽  
Inner Diameter ◽  
Discharge Pressure ◽  
Gas Admixtures

AbstractWe measured rotational temperature of oxygen plasma by optical emission spectroscopy (OES) in order to examine approximate value of its gas temperature. We generated microwave discharge oxygen plasma in a cylindrical quartz tube whose inner diameter 26 mm with its discharge pressure 0.5 - 2.0 Torr. We measured the band spectrum of radiative transition A

scholarly journals Spatially-Resolved Spectroscopic Diagnostics of a Miniature RF Atmospheric Pressure Plasma Jet in Argon Open to Ambient Air

Plasma ◽  
2020 ◽  
Vol 3 (2) ◽  
pp. 38-53
Author(s):  
Florent P. Sainct ◽  
Antoine Durocher-Jean ◽  
Reetesh Kumar Gangwar ◽  
Norma Yadira Mendoza Gonzalez ◽  
Sylvain Coulombe ◽  
...  
Keyword(s):  
Electron Temperature ◽  
Atmospheric Pressure ◽  
Rotational Temperature ◽  
Atmospheric Pressure Plasma ◽  
Optical Emission ◽  
Ambient Air ◽  
Level Population ◽  
Optical Absorption Spectroscopy ◽  
Gas Temperature ◽  
Spatially Resolved

The spatially-resolved electron temperature, rotational temperature, and number density of the two metastable Ar 1 s levels were investigated in a miniature RF Ar glow discharge jet at atmospheric pressure. The 1 s level population densities were determined from optical absorption spectroscopy (OAS) measurements assuming a Voigt profile for the plasma emission and a Gaussian profile for the lamp emission. As for the electron temperature, it was deduced from the comparison of the measured Ar 2 p i → 1 s j emission lines with those simulated using a collisional-radiative model. The Ar 1 s level population higher than 10 18 m − 3 and electron temperature around 2.5 eV were obtained close to the nozzle exit. In addition, both values decreased steadily along the discharge axis. Rotational temperatures determined from OH(A) and N 2 (C) optical emission featured a large difference with the gas temperature found from a thermocouple; a feature ascribed to the population of emitting OH and N 2 states by energy transfer reactions involving the Ar 1 s levels.

scholarly journals Rotational and gas temperatures of molecular deuterium in a hollow cathode glow discharge

2015 ◽  
Vol 38-39 (1) ◽  
pp. 11-22 ◽  
Author(s):  
G. Lj. Majstorović ◽  
N. M. Šišović
Keyword(s):  
Glow Discharge ◽  
Hollow Cathode ◽  
Low Voltage ◽  
Rotational Temperature ◽  
Energy Levels ◽  
Optical Emission ◽  
Gas Temperature ◽  
Line Intensities ◽  
Relative Line ◽  
Deuterium Molecule

Abstract We report the results of optical emission spectroscopy measurements of rotational Trot and translational (gas) temperature of deuterium molecules. The light source was a low-voltage high-pressure hollow cathode (HC) glow discharge with titanium cathode operated in deuterium. The rotational temperature of excited electronic states of D2 was determined from the intensity distribution in the rotational structure of Q-branches of the two Fulcher-α diagonal bands: [ν′ = ν″ = 2] and [ν′ =ν″ = 3]. The population of the excited energy levels, determined from relative line intensities, was used to derive the radial distributions of the temperature of the excited and the ground state of the deuterium molecule.

scholarly journals Gas Temperature Distribution in Cathode Fall Region of Grimm Glow Discharge

2018 ◽  
Vol 5 (3) ◽  
pp. 122-124 ◽  
Author(s):  
G. Majstorovic ◽  
M. Vasiljevic ◽  
N. Šišovic
Keyword(s):  
Glow Discharge ◽  
Vibrational State ◽  
Cathode Surface ◽  
Rotational Temperature ◽  
Optical Emission ◽  
Cathode Fall ◽  
Gas Temperature ◽  
Excited Vibrational State ◽  
Boltzmann Plot ◽  
Argon Mixture

Optical emission spectroscopy technique was used to measure gas temperature along the axis of cylindrical abnormal glow discharge parallel to the copper cathode surface (side-on) in hydrogen-argon mixture at low pressure. The rotational temperature of excited state of H<sub>2</sub> was determined from the rotational structure of Q branch of Fulcher-α diagonal bands using Boltzmann plot technique while the obtained ground vibrational state temperature is assumed to be equal to gas temperature. The temperature T<sub>0</sub> determined from the rotational population density distribution in an excited vibrational state can be considered as a valid estimation of the ground state temperatutre i.e. H<sub>2</sub> gas temperature.

scholarly journals Optical Emission Spectra of Oxygen Plasma Produced by Radio-Frequency Plasma

2009 ◽  
Vol 18 (2) ◽  
pp. 102-107
Author(s):  
Do-Yeob Kim ◽  
Min-Su Kim ◽  
Tae-Hoon Kim ◽  
Ghun-Sik Kim ◽  
Hyun-Young Choi ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Oxygen Plasma ◽  
Emission Spectra ◽  
Optical Emission ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Optical Emission Spectra

Is the Rotational Temperature of OH(A-X) for Discharges in and in Contact with Liquids a Good Diagnostic for Determining the Gas Temperature?

2009 ◽  
Vol 6 (11) ◽  
pp. 751-762 ◽  
Author(s):  
Peter Bruggeman ◽  
Daan C. Schram ◽  
Michael G. Kong ◽  
Christophe Leys
Keyword(s):  
Rotational Temperature ◽  
Gas Temperature

Electrical and spectral property of cold arc plasma at atmospheric pressure

2012 ◽  
Vol 78 (6) ◽  
pp. 617-620
Author(s):  
YUAN ZHONG-CAI ◽  
SHI JIA-MING ◽  
CHEN ZONG-SHENG ◽  
XU BO
Keyword(s):  
Atmospheric Pressure ◽  
Arc Discharge ◽  
Rotational Temperature ◽  
Molecular Nitrogen ◽  
Atmospheric Pressure Plasma ◽  
Emission Spectra ◽  
Optical Emission ◽  
Plasma Jet ◽  
Ambient Air ◽  
Arc Plasma

AbstractAn atmospheric pressure plasma jet is generated with a cold arc discharge in ambient air. The current-voltage characteristics and optical emission spectra of plasma discharges are investigated. The molecular nitrogen (N2), hydroxyl radical (OH), and oxygen atom (O) are observed and analyzed. Based on the best fit of the simulated spectra of N2 (C3∏u+ − B3∏g+) band and OH (A2∑+ − X2∏) band transition and the experimentally recorded spectra, the rotational temperature and the vibrational temperature of atmospheric pressure cold arc plasma jet (APCAPJ) are estimated.

In-Situ SubStrate Temperature Measurement During a-Sin Plasma CVD from N2 Rotational Temperature

1989 ◽  
Vol 165 ◽  
Author(s):  
Shin-Ichiro Ishihara ◽  
Akira Otsuka ◽  
Seiichi Nagata
Keyword(s):  
Substrate Temperature ◽  
Rotational Temperature ◽  
Etching Rate ◽  
Thermal Conductance ◽  
Ammonium Fluoride ◽  
Nitrogen Molecule ◽  
Gas Temperature ◽  
Rf Glow Discharge ◽  
Film Characteristics

AbstractRotational temperature (Tr) of nitrogen molecule, equivalent to the gas temperature (Tg), was used for monitoring silicon nitride (SiN) surface temperature during rf glow discharge processing. SiN film characteristics such as deposition rate and etching rate for mixture of hydro-fluoric acid (HF) and ammonium fluoride : (NH4F) were dependent on Tr near the substrate. The Tr increased not only with substrate temperature setting (To) but also with gas mixing ratio of H2/(H2+N2) due to improvement of thermal conductance from heater to substrate in the process chamber.

Measurement of vibrational and rotational temperature in spark-discharge plasma by optical emission spectroscopy: Change in thermal equilibrium characteristics of plasma under air flow

2018 ◽  
Vol 20 (7) ◽  
pp. 746-757 ◽  
Author(s):  
Masao Kinoshita ◽  
Takayuki Fuyuto ◽  
Hiroshi Akatsuka
Keyword(s):  
Thermal Equilibrium ◽  
Optical Emission Spectroscopy ◽  
Discharge Plasma ◽  
Vibrational Temperature ◽  
Rotational Temperature ◽  
Air Flow ◽  
Optical Emission ◽  
Spark Discharge ◽  
Spark Plug ◽  
Spark Discharge Plasma

The vibrational and rotational temperatures in a spark-discharge plasma were measured using optical emission spectroscopy, and the influence of the air flow velocity and ambient pressure on these temperatures was investigated. The optical emissions from the plasma were led to an imaging spectroscope through an optical fiber. The temperature was estimated by fitting a theoretically calculated spectrum to that which had been acquired experimentally, formed by nitrogen molecule emission from 372 to 382 nm. The spark-discharge plasma was examined with a flow of ambient air at a discharge energy of 80 mJ. The air flow caused the spark-discharge channel to elongate downstream. At the center of the spark plug gap, the vibrational temperature in the plasma was 4000 K, whereas the rotational temperature was 2000 K. This plasma can be regarded as being in non-thermal equilibrium because the vibrational temperature was higher than the rotational temperature. At a position approximately 3 mm downstream from the spark plug gap, the vibrational and rotational temperatures increased to 4500 and 4000 K, respectively, while approaching each other. Both temperatures reached a maximum value. These results show that the plasma transitions from non-thermal equilibrium to thermal equilibrium as it is elongated by the air flow. Ignition efficiency improvements can be expected if the time required to transition from non-thermal to thermal equilibrium can be shortened.

Gas temperature measurement in CH4/CO2 dielectric-barrier discharges by optical emission spectroscopy

2003 ◽  
Vol 93 (8) ◽  
pp. 4432-4438 ◽  
Author(s):  
Jorge Luque ◽  
Martin Kraus ◽  
Alexander Wokaun ◽  
Ken Haffner ◽  
Ulrich Kogelschatz ◽  
...  
Keyword(s):  
Temperature Measurement ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Dielectric Barrier Discharges ◽  
Gas Temperature ◽  
Dielectric Barrier ◽  
Barrier Discharges
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