scholarly journals Spatially-Resolved Spectroscopic Diagnostics of a Miniature RF Atmospheric Pressure Plasma Jet in Argon Open to Ambient Air

Plasma ◽  
2020 ◽  
Vol 3 (2) ◽  
pp. 38-53
Author(s):  
Florent P. Sainct ◽  
Antoine Durocher-Jean ◽  
Reetesh Kumar Gangwar ◽  
Norma Yadira Mendoza Gonzalez ◽  
Sylvain Coulombe ◽  
...  
Keyword(s):  
Electron Temperature ◽  
Atmospheric Pressure ◽  
Rotational Temperature ◽  
Atmospheric Pressure Plasma ◽  
Optical Emission ◽  
Ambient Air ◽  
Level Population ◽  
Optical Absorption Spectroscopy ◽  
Gas Temperature ◽  
Spatially Resolved

The spatially-resolved electron temperature, rotational temperature, and number density of the two metastable Ar 1 s levels were investigated in a miniature RF Ar glow discharge jet at atmospheric pressure. The 1 s level population densities were determined from optical absorption spectroscopy (OAS) measurements assuming a Voigt profile for the plasma emission and a Gaussian profile for the lamp emission. As for the electron temperature, it was deduced from the comparison of the measured Ar 2 p i → 1 s j emission lines with those simulated using a collisional-radiative model. The Ar 1 s level population higher than 10 18 m − 3 and electron temperature around 2.5 eV were obtained close to the nozzle exit. In addition, both values decreased steadily along the discharge axis. Rotational temperatures determined from OH(A) and N 2 (C) optical emission featured a large difference with the gas temperature found from a thermocouple; a feature ascribed to the population of emitting OH and N 2 states by energy transfer reactions involving the Ar 1 s levels.

Electrical and spectral property of cold arc plasma at atmospheric pressure

2012 ◽  
Vol 78 (6) ◽  
pp. 617-620
Author(s):  
YUAN ZHONG-CAI ◽  
SHI JIA-MING ◽  
CHEN ZONG-SHENG ◽  
XU BO
Keyword(s):  
Atmospheric Pressure ◽  
Arc Discharge ◽  
Rotational Temperature ◽  
Molecular Nitrogen ◽  
Atmospheric Pressure Plasma ◽  
Emission Spectra ◽  
Optical Emission ◽  
Plasma Jet ◽  
Ambient Air ◽  
Arc Plasma

AbstractAn atmospheric pressure plasma jet is generated with a cold arc discharge in ambient air. The current-voltage characteristics and optical emission spectra of plasma discharges are investigated. The molecular nitrogen (N2), hydroxyl radical (OH), and oxygen atom (O) are observed and analyzed. Based on the best fit of the simulated spectra of N2 (C3∏u+ − B3∏g+) band and OH (A2∑+ − X2∏) band transition and the experimentally recorded spectra, the rotational temperature and the vibrational temperature of atmospheric pressure cold arc plasma jet (APCAPJ) are estimated.

Stripping Photo-Resist with RF Dielectric Barrier Atmospheric Pressure Plasma

2012 ◽  
Vol 260-261 ◽  
pp. 114-119 ◽  
Author(s):  
Shao Xia Jia ◽  
Ling Li Zhao ◽  
Jing Hua Yang ◽  
Chen Zhang ◽  
Shou Gou Wang
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Emission Spectra ◽  
Optical Emission ◽  
Plasma Generator ◽  
Ambient Air ◽  
High Energy ◽  
Optical Microscope ◽  
Dielectric Barrier ◽  
Pressure Plasma

A novel radio frequency single-dielectric-barrier-discharge atmospheric pressure plasma generator was designed and utilized to strip AZ9912 photo-resist (PR). Argon (Ar) and oxygen (O2) were employed as the working gases under atmospheric pressure in ambient air. The PR stripping rate was measured as functions of time, input power, and the flow rates of the oxygen/argon. Optical Emission Spectroscopy (OES) was used to measure the optical emission spectra of the plasma to study the mechanism of PR stripping process. It is presumable that C-H bands were broken by high energy electron in the plasma and OH was generated in the process with the participation of O atom. Optical Microscope, Atomic Force Microscope (AFM) and Scanning Electron Microscope (SEM) were used to measure the surface of the silicon substrate after the stripping. It is proved that this kind of novel device could strip the AZ9912 PR effectively as high as 850nm/min, without residues and ion bombardment damage on the wafer substrate.

scholarly journals Merits of microwave plasmas for optical emission spectrometry – characterization of an axially viewed microwave-sustained, inductively coupled, atmospheric-pressure plasma (MICAP)

2020 ◽  
Vol 35 (10) ◽  
pp. 2369-2377
Author(s):  
Helmar Wiltsche ◽  
Matthias Wolfgang
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Optical Emission ◽  
Plasma Source ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Icp Oes ◽  
Microwave Plasmas ◽  
Inductively Coupled

The MICAP is a microwave driven plasma source employing nitrogen as the plasma gas. In this work we compare LODs and LOQs obtained in axial viewing with those obtained by ICP-OES and evaluate the effect of air instead of nitrogen as the plasma gas.

Studying of Plasma- Polymerized Pyrrole at Variable Gas Flow Rates Via Plasma Jet

2021 ◽  
Vol 19 (48) ◽  
pp. 44-51
Author(s):  
Saba Jawad Kadhem
Keyword(s):  
Flow Rate ◽  
Atmospheric Pressure ◽  
Gas Flow ◽  
Flow Characteristics ◽  
Atmospheric Pressure Plasma ◽  
Optical Emission ◽  
Plasma Jet ◽  
Nonequilibrium Plasma ◽  
Nano Particles ◽  
Vis Spectroscopy

     In this manuscript has investigated the synthesis of plasma-polymerized pyrrole (C4H5N) nano-particles prepared by the proposed atmospheric pressure nonequilibrium plasma jet through the parametric studies, particularly gas flow rate (0.5, 1 and 1.5 L/min). The plasma jet which used operates with alternating voltage 7.5kv and frequency 28kHz. The plasma-flow characteristics were investigated based on optical emission spectroscopy (OES). UV-Vis spectroscopy was used to characterize the  oxidization  state for polypyrrole. The major absorption appears around 464.1, 449.7 and 435.3  nm at the three flow rate of argon gas. The chemical composition and structural properties of the contained samples which synthesized at 0.5 L/min as a argon flow rate were analyzed by scanning electron microscopy (SEM), Fourier transformation infrared spectroscopy (FTIR), Raman spectroscopy and X-ray diffraction (XRD). SEM point to a uniform distribution of polypyrrole (PPY) nanoparticles matrix. XRD technique showed a semicrystalline pattern for PPY)thin film. It is expected, that the high-quality plasma polymer grown by atmospheric pressure plasma jet method contributes to serving as conducting materials.

Development and Characterization of a Portable Atmospheric-Pressure Argon Plasma Jet for Sterilization

2015 ◽  
Author(s):  
Zhi-Hua Lin ◽  
Jong-Shinn Wu ◽  
Chen-Yon Tobias Tschang ◽  
Chi-Feng Su ◽  
Tuoh Wu ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Argon Plasma ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Gas Temperature ◽  
E Coli ◽  
Bacteria Inactivation ◽  
Argon Plasma Jet ◽  
Absorption Power

In this study, we would like to develop a portable round argon atmospheric-pressure plasma jet (APPJ) which can be applied for general use of bacteria inactivation. The APPJ was characterized electrically and optically, which include measurements of absorption power, gas temperature and optical properties of plasma generated species. Measured OH* number density at 5 mm downstream was estimated to be 5.8 × 1015 cm−3 and the electron density and electron temperature were estimated to be 2.4 × 1015 cm−3 and 0.34 eV, respectively, in the discharge region. This APPJ was demonstrated to effectively inactivate E. coli within seconds of treatment, which shows its great potential in the future use of general bacteria inactivation and sterilization.

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