Elastic anisotropy of Cu and its impact on stress management for 3D IC: Nanoindentation and TCAD simulation study
2011 ◽
Vol 27
(1)
◽
pp. 339-348
◽
Keyword(s):
3D Ic
◽
Abstract
2021 ◽
2020 ◽
Vol 15
(03)
◽
pp. C03008-C03008