GISAXS study on the annealing behavior of sputtered HfO2 thin films

2013 ◽  
Vol 1528 ◽  
Author(s):  
G. S. Belo ◽  
F. Nakagomi ◽  
P. E. N. de Souza ◽  
S. W. da Silva ◽  
D. A. Buchanan
Keyword(s):  
Thin Films ◽  
Grazing Incidence ◽  
Hafnium Dioxide ◽  
Scattering Data ◽  
Annealing Behavior ◽  
Annealing Conditions ◽  
X Ray Scattering ◽  
Gaussian Distribution Function ◽  
Versatile Technique ◽  
Deposition Processes

AbstractGrazing Incidence Small-Angle X-ray Scattering (GISAXS) is a versatile technique for the analysis of nano and micro thin films surfaces. The scattering data depend strongly on the form and distribution of the scattering objects. In the present work GISAXS is used to study hafnium dioxide (HfO2) thin films deposited by magnetron sputtering using different deposition processes and post-deposition annealing conditions. Two distinct types of 15 nm thick samples were produced using different sputtering targets and different gas mixtures. The GISAXS results show that the ellipsoids that compose the thin films present a reduction in their size for both samples sets. For the sputtered Hf metal target samples, the ellipsoid diameter value shifted from 9 nm (as-deposited) to 6 nm following a 800 °C thermal treatment. For the sputtered HfO2 target samples the diameter value shifts from 19 nm (as-deposited) to 3 nm after a 800 °C anneal in oxygen. The size distribution, for both sets of samples, follows a Gaussian distribution function.

scholarly journals Comprehensive synchrotron grazing-incidence X-ray scattering analysis of nanostructures in porous polymethylsilsesquioxane dielectric thin films

2013 ◽  
Vol 46 (2) ◽  
pp. 466-475 ◽  
Author(s):  
Yecheol Rho ◽  
Byungcheol Ahn ◽  
Jinhwan Yoon ◽  
Moonhor Ree
Keyword(s):  
Thin Films ◽  
Grazing Angle ◽  
Grazing Incidence ◽  
Scattering Data ◽  
Small Contribution ◽  
Dielectric Thin Films ◽  
Dielectric Thin Film ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

A complete grazing-incidence X-ray scattering (GIXS) formula has been derived for nanopores buried in a polymer dielectric thin film supported by a substrate. Using the full power of the scattering formula, GIXS data from nanoporous polymethylsilsesquioxane dielectric thin films, a model nanoporous system, have successfully been analysed. The nanopores were found to be spherical and to have a certain degree of size distribution but were randomly dispersed in the film. In the film, GIXS was confirmed to arise predominantlyviathe first scattering process in which the incident X-ray beam scatters without reflection; the other scattering processes and their contributions were significantly dependent on the grazing angle. This study also confirmed that GIXS scattering can be analysed using only independent scattering terms, but this simple approach can only provide structural parameters. The cross terms were found to make a relatively small contribution to the intensity of the overall scattering but were required for the complete characterization of the measured two-dimensional scattering data, in particular the extracted out-of-plane scattering data, and their inclusion in the analysis enabled film properties such as film thickness, critical angle (i.e.electron density), refractive index and the absorption term to be determined.

GIXSGUI: a MATLAB toolbox for grazing-incidence X-ray scattering data visualization and reduction, and indexing of buried three-dimensional periodic nanostructured films

2015 ◽  
Vol 48 (3) ◽  
pp. 917-926 ◽  
Author(s):  
Zhang Jiang
Keyword(s):  
Thin Films ◽  
Three Dimensional ◽  
Grazing Incidence ◽  
Surface Scattering ◽  
Scattering Data ◽  
Matlab Toolbox ◽  
X Ray ◽  
X Ray Scattering ◽  
Reduction Methods ◽  
Ray Scattering

GIXSGUIis a MATLAB toolbox that offers both a graphical user interface and script-based access to visualize and process grazing-incidence X-ray scattering data from nanostructures on surfaces and in thin films. It provides routine surface scattering data reduction methods such as geometric correction, one-dimensional intensity linecut, two-dimensional intensity reshapingetc. Three-dimensional indexing is also implemented to determine the space group and lattice parameters of buried organized nanoscopic structures in supported thin films.

Quantifying Multiple Crystallite Orientations and Crystal Heterogeneities in Complex Thin Film Materials

2019 ◽  
Author(s):  
Jonathan Ogle ◽  
Daniel Powell ◽  
Eric Amerling ◽  
Detlef Matthias Smilgies ◽  
Luisa Whittaker-Brooks
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Structural Design ◽  
Grazing Incidence ◽  
Crystallite Orientation ◽  
Miller Index ◽  
X Ray ◽  
X Ray Scattering ◽  
Orientation Distributions ◽  
Orientation Information

<p>Thin film materials have become increasingly complex in morphological and structural design. When characterizing the structure of these films, a crucial field of study is the role that crystallite orientation plays in giving rise to unique electronic properties. It is therefore important to have a comparative tool for understanding differences in crystallite orientation within a thin film, and also the ability to compare the structural orientation between different thin films. Herein, we designed a new method dubbed the mosaicity factor (MF) to quantify crystallite orientation in thin films using grazing incidence wide-angle X-ray scattering (GIWAXS) patterns. This method for quantifying the orientation of thin films overcomes many limitations inherent in previous approaches such as noise sensitivity, the ability to compare orientation distributions along different axes, and the ability to quantify multiple crystallite orientations observed within the same Miller index. Following the presentation of MF, we proceed to discussing case studies to show the efficacy and range of application available for the use of MF. These studies show how using the MF approach yields quantitative orientation information for various materials assembled on a substrate.<b></b></p>

Evolution of Interfacial Roughness Correlations of Fe Au Films Grown on Mgo(001) Substrates

1996 ◽  
Vol 440 ◽  
Author(s):  
P. C. Chow ◽  
R. Paniago ◽  
R. Forrest ◽  
S. C. Moss ◽  
S. S. P. Parkin ◽  
...  
Keyword(s):  
Thin Films ◽  
Diffuse Scattering ◽  
Perfect Match ◽  
Grazing Incidence ◽  
Interface Roughness ◽  
Metallic Structures ◽  
X Ray ◽  
Dimensional Image ◽  
X Ray Scattering ◽  
Image Plate Detector

AbstractThe growth by sputtering of a series of thin films of Fe/Au on MgO(001) substrates was analyzed using Bragg and diffuse X-ray scattering. The Fe (bcc) layer grows rotated by 45° with respect to the MgO – Au(fcc) (001) epitaxial orientation, resulting in an almost perfect match between the two metallic structures. By collecting the X-ray diffuse scattering under grazing incidence using a 2-dimensional image plate detector, we mapped the reciprocal space of these films. We characterized the correlated interface roughness starting with a buffer of Fe in which only three interfaces are present. The propagation of the roughness was subsequently characterized for Fe/Au multilayers with 40 and 100 bilayers. We observe an enlargement of the surface features as a function of time, evidenced by the longer lateral cutoff length measured for thicker films.

FitGISAXS: software package for modelling and analysis of GISAXS data using IGOR Pro

2010 ◽  
Vol 43 (4) ◽  
pp. 929-936 ◽  
Author(s):  
David Babonneau
Keyword(s):  
Software Package ◽  
Form Factors ◽  
Grazing Incidence ◽  
Three Dimensions ◽  
Scattering Data ◽  
Stratified Medium ◽  
X Ray ◽  
X Ray Scattering ◽  
Structure Factors ◽  
Scripting Language

A software package for performing modelling and analysis of GISAXS (grazing-incidence small-angle X-ray scattering) data within the distorted-wave Born approximation has been developed using the IGOR Pro scripting language (http://www.wavemetrics.com). The tool suite uses a slab-model approach with the Abélès matrix method to calculate X-ray reflectivity curves, electric field intensity distributions and GISAXS intensities from supported or buried scatterers arranged in two or three dimensions in a stratified medium. Models are included to calculate the scattered intensity for monodisperse, polydisperse and interacting particles with various size distributions, form factors and structure factors. The source code for the entire package is freely available, allowing anyone to develop additional tools.

Evaluation on Pore Structures of Organosilicate Thin Films by Grazing Incidence Small-Angle X-ray Scattering

2009 ◽  
Vol 113 (38) ◽  
pp. 12623-12627 ◽  
Author(s):  
Hong-Ji Chen ◽  
Sheng-Ying Li ◽  
Xiao-Jun Liu ◽  
Rui-Peng Li ◽  
Detlef-M. Smilgies ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Pore Structures ◽  
Organosilicate Thin Films ◽  
Ray Scattering

Grazing-incidence X-ray scattering of lamellar thin films

2019 ◽  
Vol 52 (2) ◽  
pp. 247-251
Author(s):  
Detlef-M. Smilgies
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Small Molecules ◽  
Film Studies ◽  
Grazing Incidence ◽  
Semicrystalline Polymers ◽  
X Ray ◽  
X Ray Scattering ◽  
Incident Plane ◽  
Ray Scattering

Recently, surface and thin-film studies using area detectors have become prevalent. An important class of such systems are lamellar thin films formed by small molecules, liquid crystals or semicrystalline polymers. Frequently, the lamellae align more or less parallel to the substrate. Such structures can be easily discerned by their characteristic X-ray scattering close to the incident plane. This paper describes how such patterns can be simulated, in order to extract morphological information about the thin film.

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