Non-Contact True Temperature Measurements for Process Diagnostics

The accurate measurement and control of temperature can be of great importance in most materials manufacturing and processing applications. With present-day technology such measurement almost always requires either physical contact with the subject or an extensive calibration procedure. In many cases contact is either not desirable, because such contact may significantly alter the temperature or other characteristics of the subject, or is not possible because the subject is moving, is too far away, is too hot or is in an otherwise hostile environment. Similarly calibration may not be possible if the characteristics change too much.

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Temperature Measurements Using In Thermocouple In The Mocvd Rotating Disk Reactors

MRS Proceedings ◽

10.1557/proc-406-139 ◽

1995 ◽

Vol 406 ◽

Author(s):

A. I. Gurary ◽

R. A. Stall

Keyword(s):

Process Parameters ◽

Chemical Vapor ◽

Rotating Disk ◽

Temperature Measurements ◽

High Yield ◽

Wafer Temperature ◽

Rotating Disk Reactors ◽

And Control ◽

Measurement And Control ◽

Accuracy And Repeatability

AbstractRotating Disk Reactors used for Metalorganic Chemical Vapor Deposition have evolved into a leading manufacturing technology for several materials, including nitrides, compound semiconductors, metals, and oxides. One of the major issues to be resolved in bringing this technology into routine high yield manufacturing has been precise and repeatable wafer temperature measurement and control. The conventional approach to the rotating wafer temperature measurements by a stationary thermocouple located near the rotating wafer carrier suffers from low accuracy and repeatability. We have implemented a rotating thermocouple with a junction located close to the wafer for the temperature measurements in the MOCVD Rotating Disk Reactor. This approach allowed us to obtain reliable and accurate wafer temperature measurements with minimum dependence upon variable process parameters and to protect the thermocouple from degradation in the aggressive reactor environment. The temperature difference between wafer and thermocouple for the rotating and stationary thermocouple designs as a function of process parameters will be discussed.

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Robotic Measurement and Control for Chiropractic Research

Applied Bionics and Biomechanics ◽

10.1155/2006/830150 ◽

2006 ◽

Vol 3 (1) ◽

pp. 43-48 ◽

Cited By ~ 5

Author(s):

P. Goldsmith ◽

S. Wynd ◽

G. Kawchuk

Keyword(s):

Robot Manipulator ◽

Vision System ◽

Parallel Robot ◽

Calibration Procedure ◽

Positional Accuracy ◽

Experimental Procedure ◽

Control Scheme ◽

And Control ◽

Measurement And Control ◽

Chiropractic Research

The precision and programmability of robotic manipulators makes them suitable for biomechanics research, particularly when an experimental procedure must be accurately repeated multiple times. This paper describes a robotic system used to investigate biomechanical mechanisms of stroke in humans. A parallel robot manipulator is used to reproduce chiropractic manipulations on animal subjects using a 3-D vision system. An algorithm for calibrating the system is proposed and tested on the robot. An iterative learning control scheme is then introduced to improve positional accuracy. Experimental results demonstrate that the calibration procedure and learning scheme are both effective.

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Instrument Science and Technology: A Systemised Discipline

Measurement and Control ◽

10.1177/002029408301600203 ◽

1983 ◽

Vol 16 (2) ◽

pp. 63-71 ◽

Cited By ~ 3

Author(s):

B. E. Jones

Keyword(s):

Higher Education ◽

Practical Knowledge ◽

Science And Technology ◽

Logical Framework ◽

Recent Developments ◽

The Subject ◽

Industry And Commerce ◽

And Control ◽

Measurement And Control ◽

And Training

Modern industry and commerce are dependent on accurate measurement, and there is a need throughout all industry for improvement in measurement skills. The science and technology of measurement is a multi-disciplinary subject, while measurement and control are interdependent. Sufficient and proper teaching and training in the subject, particularly in further and higher education, is unlikely to occur unless the subject becomes established as a systemised discipline in its own right. A set of unifying, underlying, general principles and concepts organised in a logical framework is required, although it is desirable to avoid both the temptation to overtheorise and to produce mere catalogues of devices. Of considerable importance is a suitable means of presenting theoretical and practical knowledge about primary sensing elements and measuring transducers. The paper will consider recent developments that are helping to establish the discipline of measurements.

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A Survey of Measurement and Control of Pollutants

Measurement and Control ◽

10.1177/002029407100401001 ◽

1971 ◽

Vol 4 (10) ◽

pp. T163-T172

Author(s):

D. J. Garrod

Keyword(s):

Cross Section ◽

General Survey ◽

General Picture ◽

The Subject ◽

The Individual ◽

And Control ◽

Measurement And Control

When the title of the symposium was first decided, the organising committee considered that a general survey of the subject was required so that (a) they would be in a position to judge whether or not the papers received were a reasonable cross section of the subject, and (b) it could be used to indicate to the delegates where the subject of the individual speakers comes within the general picture. Unfortunately, there was none readily available, and therefore the author as a member of the organising committee, decided to formulate such a survey. Some parts of the survey are not as detailed or informative as intended, and the author would be grateful for advice on any errors or omissions which are noticed.

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Context Transformations of Range Images Using Directional Data Back Fill Algorithm

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.759.59 ◽

2015 ◽

Vol 759 ◽

pp. 59-69

Author(s):

Andrzej Sioma

Keyword(s):

Laser Line ◽

Laser Triangulation ◽

Range Image ◽

Range Images ◽

Image Transformation ◽

Vision Systems ◽

Entire Surface ◽

The Subject ◽

And Control ◽

Measurement And Control

This paper discusses the subject of filtering range images constructed using vision systems. Construction of a range image using the laser triangulation method LTM is burdened by noise resulting from the specificity of the adopted method. This method uses structural illumination, usually in the form of a laser line from the object illumination. The image of the object is captured by a camera, whereupon the laser line image is transformed into height profiles, which are then used to construct a range image of the object. Yet, such images fail to describe the entire surface of the object, due to occlusion. Occlusion of image fragments occurs in two forms. The first one stems from the impossibility to fully illuminate all surfaces of the object, due to occlusion of the laser lines. The second form occurs when the surface is illuminated properly, but the image of this surface cannot be captured by the camera. In both cases, there is an occlusion which usually results from the shape of the object. This paper describes the method of backfilling the data in undefined areas of range images caused to the phenomenon of occlusion. It suggests a method of defining the direction of data backfilling, identification of undefined areas, as well as methods of calculating and backfilling height differences at undefined spots. The purpose of these transformations is to prepare the image for measurement and control tasks. Select examples are presented with the results of image transformation using the developed data backfilling method.

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