Structure of Amorphous A12O3 Produced by Ion Implantation
Keyword(s):
Ion Beam
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ABSTRACTThe amorphous state can be produced in α-Al2O3 by ion beam induced displacements at 77 K or by displacements combined with chemical effects at room temperature. Progress toward understanding the amorphization process has been made from studies of the short-range order, electronic charge on implanted species, and the critical composition for amorphization. Results are presented for implantation of Al + O in the stoichiometric ratio, zirconium, iron, and tin.
1980 ◽
Vol 35
(11)
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pp. 1178-1181
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1987 ◽
Vol 23
(3)
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pp. 337-343
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2020 ◽
pp. 62-69