Non-Destructive Measurements of III-V Semiconductor Device Structure by a Hard X-ray Microprobe

1991 ◽  
Vol 240 ◽  
Author(s):  
F. Uchida ◽  
J. Shigeta ◽  
Y. SUZUKI
Keyword(s):  
Semiconductor Device ◽  
Film Structure ◽  
Device Structure ◽  
X Ray ◽  
Model Sample ◽  
Device Structures ◽  
The Difference ◽  
X Ray Absorption ◽  
Non Destructive ◽  
Non Destructive Characterization

ABSTRACTA non-destructive characterization technique featuring a hard X-ray Microprobe is demonstrated for lll-V semiconductor device structures. A GaAs FET with a 2 μm gate length is measured as a model sample of a thin film structure. X-ray scanning microscopic images of the FET are obtained by diffracted X-ray and fluorescence X-ray detection. Diffracted X-ray detection measures the difference in gate material and source or drain material as a gray level difference on the image due to the X-ray absorption ratio. Ni Ka fluorescence detection, on the other hand, provides imaging of 500 Å thick Ni layers, which are contained only in the source and drain metals, through non-destructive observation.

scholarly journals Non-destructive characterization of extended crystalline defects in confined semiconductor device structures

Nanoscale ◽  
2018 ◽  
Vol 10 (15) ◽  
pp. 7058-7066 ◽  
Author(s):  
Andreas Schulze ◽  
Libor Strakos ◽  
Tomas Vystavel ◽  
Roger Loo ◽  
Antoine Pacco ◽  
...  
Keyword(s):  
Semiconductor Device ◽  
Quantitative Characterization ◽  
Crystalline Defects ◽  
Device Structures ◽  
Non Destructive ◽  
Non Destructive Characterization

Non-destructive and quantitative characterization of crystalline defects: understanding the formation and distribution of defects in nanoscale semiconductor device structures.

scholarly journals Energy dispersive X-ray diffraction (EDXRD) for operando materials characterization within batteries

2020 ◽  
Vol 22 (37) ◽  
pp. 20972-20989 ◽  
Author(s):  
Amy C. Marschilok ◽  
Andrea M. Bruck ◽  
Alyson Abraham ◽  
Chavis A. Stackhouse ◽  
Kenneth J. Takeuchi ◽  
...  
Keyword(s):  
Materials Characterization ◽  
Energy Dispersive ◽  
System Level ◽  
X Ray Diffraction ◽  
X Ray ◽  
Non Destructive ◽  
Non Destructive Characterization

This review highlights the efficacy of EDXRD as a non-destructive characterization tool in elucidating system-level phenomena for batteries.

Local atomic structure in tetragonal pure ZrO2nanopowders

2010 ◽  
Vol 43 (2) ◽  
pp. 227-236 ◽  
Author(s):  
Leandro M. Acuña ◽  
Diego G. Lamas ◽  
Rodolfo O. Fuentes ◽  
Ismael O. Fábregas ◽  
Márcia C. A. Fantini ◽  
...  
Keyword(s):  
Tetragonal Phase ◽  
Local Structure ◽  
X Ray Diffraction ◽  
X Ray ◽  
Atomic Structures ◽  
Crystallite Sizes ◽  
Exafs Study ◽  
The Difference ◽  
X Ray Absorption ◽  
Good Agreement

The local atomic structures around the Zr atom of pure (undoped) ZrO2nanopowders with different average crystallite sizes, ranging from 7 to 40 nm, have been investigated. The nanopowders were synthesized by different wet-chemical routes, but all exhibit the high-temperature tetragonal phase stabilized at room temperature, as established by synchrotron radiation X-ray diffraction. The extended X-ray absorption fine structure (EXAFS) technique was applied to analyze the local structure around the Zr atoms. Several authors have studied this system using the EXAFS technique without obtaining a good agreement between crystallographic and EXAFS data. In this work, it is shown that the local structure of ZrO2nanopowders can be described by a model consisting of two oxygen subshells (4 + 4 atoms) with different Zr—O distances, in agreement with those independently determined by X-ray diffraction. However, the EXAFS study shows that the second oxygen subshell exhibits a Debye–Waller (DW) parameter much higher than that of the first oxygen subshell, a result that cannot be explained by the crystallographic model accepted for the tetragonal phase of zirconia-based materials. However, as proposed by other authors, the difference in the DW parameters between the two oxygen subshells around the Zr atoms can be explained by the existence of oxygen displacements perpendicular to thezdirection; these mainly affect the second oxygen subshell because of the directional character of the EXAFS DW parameter, in contradiction to the crystallographic value. It is also established that this model is similar to another model having three oxygen subshells, with a 4 + 2 + 2 distribution of atoms, with only one DW parameter for all oxygen subshells. Both models are in good agreement with the crystal structure determined by X-ray diffraction experiments.

scholarly journals NO binding kinetics in myoglobin investigated by picosecond Fe K-edge absorption spectroscopy

2015 ◽  
Vol 112 (42) ◽  
pp. 12922-12927 ◽  
Author(s):  
Mahsa Silatani ◽  
Frederico A. Lima ◽  
Thomas J. Penfold ◽  
Jochen Rittmann ◽  
Marco E. Reinhard ◽  
...  
Keyword(s):  
Active Center ◽  
Absorption Spectroscopy ◽  
Spectroscopic Studies ◽  
Pump Probe ◽  
X Ray ◽  
The Difference ◽  
Direct Sensitivity ◽  
X Ray Absorption ◽  
Recombination Kinetics ◽  
532 Nm

Diatomic ligands in hemoproteins and the way they bind to the active center are central to the protein’s function. Using picosecond Fe K-edge X-ray absorption spectroscopy, we probe the NO-heme recombination kinetics with direct sensitivity to the Fe-NO binding after 532-nm photoexcitation of nitrosylmyoglobin (MbNO) in physiological solutions. The transients at 70 and 300 ps are identical, but they deviate from the difference between the static spectra of deoxymyoglobin and MbNO, showing the formation of an intermediate species. We propose the latter to be a six-coordinated domed species that is populated on a timescale of ∼200 ps by recombination with NO ligands. This work shows the feasibility of ultrafast pump–probe X-ray spectroscopic studies of proteins in physiological media, delivering insight into the electronic and geometric structure of the active center.

Non-destructive characterization of lithium deposition at the Li/separator and Li/carbon matrix interregion by synchrotron X-ray tomography

Nano Energy ◽  
2019 ◽  
Vol 62 ◽  
pp. 11-19 ◽  
Author(s):  
Kang Dong ◽  
Markus Osenberg ◽  
Fu Sun ◽  
Henning Markötter ◽  
Charl J. Jafta ◽  
...  
Keyword(s):  
Carbon Matrix ◽  
X Ray ◽  
Lithium Deposition ◽  
Non Destructive ◽  
Non Destructive Characterization

Colouration mechanism of underglaze copper-red decoration porcelain (AD 13th–14th century), China

2014 ◽  
Vol 21 (4) ◽  
pp. 751-755 ◽  
Author(s):  
Jian Zhu ◽  
Huiping Duan ◽  
Yimin Yang ◽  
Li Guan ◽  
Wei Xu ◽  
...  
Keyword(s):  
Copper Content ◽  
X Ray ◽  
Content Difference ◽  
Valence States ◽  
Scattering Effects ◽  
Orange Region ◽  
Destructive Analysis ◽  
Colour Generation ◽  
X Ray Absorption ◽  
Non Destructive

Underglaze copper-red decoration,i.e.the copper colourant used to paint diversified patterns on the surface of a body and then covered by transparent glaze and fired at high temperature in a reductive firing environment, is famous all over the world. However, the red colouration mechanism generated by underglaze copper remains unclear. In particular, the fact that the edges of the red patterns are orange has been ignored in previous research. Here, non-destructive analysis has been carried out on a precious fragment of early underglaze red porcelain using synchrotron radiation X-ray fluorescence, X-ray absorption near-edge spectroscopy (XANES) and reflection spectrometry techniques. The results suggest that the copper content in the red region is higher than that in the orange region, and other colour generation elements do not have obvious content difference, indicating that the colour generation effect of the underglaze red product is related to the copper content. XANES analysis shows that the valence states of copper in the red and orange regions are similar and metal copper contributes to their hues. The results of reflection spectrometry demonstrate that tiny orange hues could be attributed to the Mie scatting effect. Therefore, light-scattering effects should be considered when researching the colouration mechanism of underglaze red.

Mosaic Crystal Model for Dynamical X-Ray Diffraction from Step-Graded InxGa1-xAs and InxAl1-xAs/GaAs (001) Metamorphic Buffers and Device Structures

2017 ◽  
Vol 26 (03) ◽  
pp. 1740019
Author(s):  
P. B. Rago ◽  
J. E. Ayers
Keyword(s):  
Semiconductor Device ◽  
High Electron Mobility Transistors ◽  
High Electron ◽  
X Ray Diffraction ◽  
General Applicability ◽  
X Ray ◽  
Device Structures ◽  
Mosaic Crystal ◽  
Crystal Model ◽  
Metamorphic Buffers

In this paper we apply a mosaic crystal model for dynamical x-ray diffraction to step-graded metamorphic semiconductor device structures containing dislocations. This model represents an extension of the previously-reported phase-invariant model, which is broadly applicable and serves as the basis for the x-ray characterization of metamorphic structures, allowing determination of the depth profiles of strain, composition, and dislocation density. The new model has more general applicability and is more appropriate for step-graded metamorphic device structures, which are of particular interest for high electron mobility transistors and light emitting diodes. Here we present the computational details of the mosaic crystal model and demonstrate its application to step-graded InxGa1-xAs/GaAs (001) and InxAl1-xAs/GaAs (001) metamorphic buffers and device structures.

Application of X-Ray CT for Non-destructive Characterization of Graphite Fuel-Tube

2016 ◽  
Vol 35 (3) ◽  
Author(s):  
A. K. Agrawal ◽  
P. S. Sarkar ◽  
Y. S. Kashyap ◽  
B. Singh ◽  
A. Sharma ◽  
...  
Keyword(s):  
X Ray ◽  
Non Destructive ◽  
Non Destructive Characterization ◽  
Fuel Tube
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