Titanium Surface Hardening by Pulsed Nitrogen Ion Implantation
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ABSTRACTLayers of TiN have been developed on pure titanium samples using pulsed ion beams generated with a Plasma Gun operated in the detonation mode.XPS analyses show TiNx formation in depths >0.6μm, with stoichiometric x>0.8. The efficient TiN formation in this process can be attributed to the fast energy released by the pulsed beams, which can increase the surface layer temperatures at a ∼15K/ns rate, generating thermal gradients of ∼1500K/μm. This thermal effect can help the titanium getter effect on the nitrogen plasma bubble.
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