Detailed Characterisations of GaAs Films on Si Obtained by Conformal Growth.

1992 ◽  
Vol 280 ◽  
Author(s):  
B. Gerard ◽  
D. Pribat ◽  
R. Bisaro ◽  
E. Costard ◽  
J. Nagle ◽  
...  
Keyword(s):  
Crystal Growth ◽  
Dislocation Density ◽  
The Self ◽  
Epitaxial Lateral Overgrowth ◽  
X Ray Diffraction ◽  
X Ray ◽  
Lateral Overgrowth ◽  
State Of Stress ◽  
Low Dislocation Density ◽  
Gaas Films

ABSTRACTConformal growth is a confined epitaxial lateral overgrowth technique capable of yielding low dislocation density GaAs films on Si. This technique makes extensive use of selective epitaxy and crystal growth is confined by a dielectric cap as well as by the self-passivated Si surface itself.In this paper, we have performed a detailed characterisation of the state of stress of the GaAs films in various configurations (after conformal growth and removal of the seed regions, and after the regrowth of an MBE layer) by photoluminescence measurements at 5K and X-ray diffraction experiments. Although the as-grown conformal films are found in the same state of stress than reference MOCVD GaAs epilayers on Si, we report a significant decrease of this stress after MBE regrowth on conformal films.

Trenched epitaxial lateral overgrowth of fast coalesced a-plane GaN with low dislocation density

2006 ◽  
Vol 89 (25) ◽  
pp. 251109 ◽  
Author(s):  
Te-Chung Wang ◽  
Tien-Chang Lu ◽  
Tsung-Shine Ko ◽  
Hao-Chung Kuo ◽  
Min Yu ◽  
...  
Keyword(s):  
Dislocation Density ◽  
Epitaxial Lateral Overgrowth ◽  
Lateral Overgrowth ◽  
Low Dislocation Density

Nanorod epitaxial lateral overgrowth of a-plane GaN with low dislocation density

2009 ◽  
Vol 94 (25) ◽  
pp. 251912 ◽  
Author(s):  
Shih-Chun Ling ◽  
Chu-Li Chao ◽  
Jun-Rong Chen ◽  
Po-Chun Liu ◽  
Tsung-Shine Ko ◽  
...  
Keyword(s):  
Dislocation Density ◽  
Epitaxial Lateral Overgrowth ◽  
Lateral Overgrowth ◽  
Low Dislocation Density

Mask-Induced Strain in Gaas Layers Grown by Liquid Phase Epitaxial Lateral Overgrowth

1999 ◽  
Vol 570 ◽  
Author(s):  
Z.R. Zytkiewicz ◽  
J. Domagala ◽  
D. Dobosz
Keyword(s):  
Liquid Phase ◽  
Epitaxial Lateral Overgrowth ◽  
X Ray Diffraction ◽  
Liquid Phase Epitaxial ◽  
X Ray ◽  
Vertical Strain ◽  
Lateral Overgrowth ◽  
Gaas Substrates ◽  
Show Evidence ◽  
Vertical Growth Rate

ABSTRACTX-ray diffraction has been used to study the mask-induced strain in GaAs layers grown by the liquid phase epitaxial lateral overgrowth (ELO) on (100) GaAs substrates. SiO2 mask has been investigated to produce seeding areas for the ELO growth. It has been found that SiO2 attracts the ELO layers, which leads to their pronounced bending towards the oxide film and to the appearance of vertical strain in laterally grown parts of ELO. When SiO2 is removed by selective etching this strain disappears. We show evidence that the bending of ELO layers is reduced when the density of substrate dislocations is increased. This is explained as being due to enhancement of the initial vertical growth rate by dislocations supplying steps on the upper surface of ELO.

Fabrication of GaN layer with Low Dislocation Density using Facet controlled ELO technique

2000 ◽  
Vol 639 ◽  
Author(s):  
H. Miyake ◽  
H. Mizutani ◽  
K. Hiramatsu ◽  
Y. Iyechika ◽  
Y. Honda ◽  
...  
Keyword(s):  
Dislocation Density ◽  
Vapor Phase ◽  
Low Pressure ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Epitaxial Lateral Overgrowth ◽  
Lateral Overgrowth ◽  
Low Dislocation Density ◽  
Window Region

ABSTRACTGaN layers with low dislocation density have been fabricated be means of facet-controlled epitaxial lateral overgrowth (FACELO) via low-pressure metalorganic vapor phase epitaxy (LP-MOVPE). The distribution of the dislocations in FACELO GaN was inspected by observation of InGaN growth pits. For FACELO with {11-20} facets as the first step, the dislocations concentrate only in the window region. For FACELO with {11-22} facets as the first step, the dislocations exist only in the coalescence region. The double FACELO, which was FACELO with {11-20} on FACELO with {11-22}, was demonstrated and dislocation density of less than 105 cm−2 was achieved.

scholarly journals Low dislocation density, high power InGaN laser diodes

2004 ◽  
Vol 9 ◽  
Author(s):  
Piotr Perlin ◽  
M. Leszczyñski ◽  
P. Prystawko ◽  
P. Wisniewski ◽  
R. Czernetzki ◽  
...  
Keyword(s):  
Dislocation Density ◽  
High Power ◽  
Laser Diodes ◽  
Epitaxial Lateral Overgrowth ◽  
Homogeneous Distribution ◽  
Lateral Overgrowth ◽  
Low Dislocation Density ◽  
Bulk Gan ◽  
New Generation ◽  
Better Than

We used single crystals of GaN, obtained from high-pressure synthesis, as substrates for Metalorganics Vapor Phase Epitaxy growth of violet and UV laser diodes. The use of high-quality bulk GaN leads to the decrease of the dislocation density to the low level of 105 cm−2, i.e. two orders of magnitude better than typical for the Epitaxial Lateral Overgrowth laser structures fabricated on sapphire. The low density and homogeneous distribution of defects in our structures enables the realization of broad stripe laser diodes. We demonstrate that our laser diodes, having 15 μm wide stripes, are able to emit 1.3-1.9 W per facet (50% reflectivity) in 30 ns long pulses. This result, which is among the best ever reported for nitride lasers, opens the path for the development of a new generation of high power laser diodes.

scholarly journals Void Shapes Controlled by Using Interruption-Free Epitaxial Lateral Overgrowth of GaN Films on Patterned SiO2AlN/Sapphire Template

2014 ◽  
Vol 2014 ◽  
pp. 1-8 ◽  
Author(s):  
Yu-An Chen ◽  
Cheng-Huang Kuo ◽  
Li-Chuan Chang ◽  
Ji-Pu Wu
Keyword(s):  
Electron Microscopy ◽  
Epitaxial Lateral Overgrowth ◽  
Threading Dislocation ◽  
X Ray Diffraction ◽  
Air Voids ◽  
X Ray ◽  
Lateral Overgrowth ◽  
Transmission Electron ◽  
Gan Film ◽  
Scanning Electron

GaN epitaxial layers with embedded air voids grown on patterned SiO2AlN/sapphire templates were proposed. Using interruption-free epitaxial lateral overgrowth technology, we realized uninterrupted growth and controlled the shape of embedded air voids. These layers showed improved crystal quality using X-ray diffraction and measurement of etching pits density. Compared with conventional undoped-GaN film, the full width at half-maximum of the GaN (0 0 2) and (1 0 2) peaks decreased from 485 arcsec to 376 arcsec and from 600 arcsec to 322 arcsec, respectively. Transmission electron microscopy results showed that the coalesced GaN growth led to bending threading dislocation. We also proposed a growth model based on results of scanning electron microscopy.

scholarly journals Fabrication of Low Dislocation Density, Single-Crystalline Diamond via Two-Step Epitaxial Lateral Overgrowth

Crystals ◽  
2017 ◽  
Vol 7 (4) ◽  
pp. 114 ◽  
Author(s):  
Fengnan Li ◽  
Jingwen Zhang ◽  
Xiaoliang Wang ◽  
Minghui Zhang ◽  
and Hongxing Wang
Keyword(s):  
Dislocation Density ◽  
Epitaxial Lateral Overgrowth ◽  
Single Crystalline ◽  
Lateral Overgrowth ◽  
Low Dislocation Density

Characteristics of Fielo-GaN Grown by Hydride Vapor Phase Epitaxy

2000 ◽  
Vol 639 ◽  
Author(s):  
Akira Usui ◽  
Haruo Sunakawa ◽  
Kenji Kobayashi ◽  
Heiji Watanabe ◽  
Masashi Mizuta
Keyword(s):  
Electron Microscopy ◽  
Dislocation Density ◽  
Hydride Vapor Phase Epitaxy ◽  
Epitaxial Lateral Overgrowth ◽  
Rocking Curve ◽  
X Ray ◽  
Lateral Overgrowth ◽  
Dislocation Behavior ◽  
Reflection Electron Microscopy

ABSTRACTThe crystal quality of facet-initiated epitaxial lateral overgrowth (FIELO) -GaN, in particular, that in the vicinity of the GaN surface, is reported. It is shown that the surface smoothness of FIELO-GaN enables us to use it as an “epi-ready” substrate. The crystallinity of FIELO-GaN is evaluated by x-ray rocking curve (XRC) measurements. We indicate that the FWHM of XRC should be reduced with the decrease of the dislocation density. We previously reported that the dislocation behavior of FIELO-GaN causes the tilting of the c-axis in the overgrown regions. By using scanning reflection electron microscopy (SREM), however, we show that the tilting on the surface of thick FIELO-GaN was negligibly small.

White Beam Synchrotron X-ray Topography and X-ray Diffraction Measurements of Epitaxial Lateral Overgrowth of GaN

2001 ◽  
Vol 693 ◽  
Author(s):  
W.M. Chen ◽  
P.J. McNally ◽  
K. Jacobs ◽  
T. Tuomi ◽  
A.N. Danilewsky ◽  
...  
Keyword(s):  
Fill Factor ◽  
Epitaxial Lateral Overgrowth ◽  
X Ray Diffraction ◽  
Reflection Mode ◽  
Rocking Curve ◽  
X Ray ◽  
Lateral Overgrowth ◽  
White Beam ◽  
Curve Method ◽  
Opening Width

AbstractThe Epitaxial Lateral Overgrowth (ELO) of GaN on Al2O3 using a SiO2 mask with different fill factors (ratio of stripe opening width to stripe period) is examined with White Beam Synchrotron X-ray Topography (WBSXT) and X-ray rocking curve analysis. The sapphire substrate was identified with a dislocation density of the order of ~106cm-2. WBSXT in both transmission and back reflection mode is used to image the ELO GaN and confirms that crystal planes in the lateral overgrown part (wing) are tilted, and that the wing tilt increases as the fill factor increases. X-ray rocking curve and WBSXT measurements confirm the same wing tilt tendency as the fill factor changes. The WBSXT method provides a measure of the maximum wing tilt, while the X-ray rocking curve method gives the average wing tilt. The average wing tilt reaches about 1602 arcsec at a fill factor of 0.625, but the maximum wing tilts can reach values as large as 2372 arcsec when the fill factor is only 0.571. This study shows that WBSXT is an effective method in dislocation and wing tilt determination for the GaN on Al2O3 ELO epilayer system or indeed for similar systems. The tilted wings induce a slightly lower compressive stress in the coalesced region of the GaN epilayer.

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