Delta Doping for Deep Level Analysis in Semiconductors
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ABSTRACTThe occupation of deep-level defects in semiconductors is investigated by delta-doping such impurities at a specified distance from the metallurgical boundary within Schottky diodes. Capacitance-voltage characteristics are analyzed using ID device simulation software. These characteristics change significantly depending on the deep-level energy and the sheet position. This new approach to deep-level analysis is applied to Schottky diodes on MBE-grown n-GaAs with a planar titanium doped sheet. At moderate Ti concentrations the well-known Ti acceptor level near Ec-0.2 eV governs the electrical properties. In addition, two other types of Ti defects are found.
1992 ◽
Vol 173
(2)
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pp. 661-670
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2011 ◽
Vol 178-179
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pp. 183-187
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1999 ◽
Vol 2
(3)
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pp. 155-158
2000 ◽
Vol 9
(3-6)
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pp. 413-416
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