Control of Long-Lived Gas Emissions From Semiconductor Processing Equipment

1994 ◽  
Vol 344 ◽  
Author(s):  
Michael T. Mocella
Keyword(s):  
Thin Film ◽  
Global Warming ◽  
Gas Phase ◽  
Cross Sections ◽  
Semiconductor Industry ◽  
Absorption Cross ◽  
Semiconductor Processing ◽  
Gas Emissions ◽  
Industrial Policies ◽  
Global Warming Potentials

AbstractCertain perfluorocompounds (PFCs) - including CF4, C2F6, SF6, and NF3 - are widely used in gas phase thin film processing applications such as dry etching and CVD chamber cleaning. Through a combination of long atmospheric lifetimes and high infrared absorption cross sections, many PFCs have high global warming potentials (GWPs). Abatement of PFC emissions from semiconductor applications is consistent with existing and developing international, national, and industrial policies for the control of greenhouse gas emissions. For PFC applications in the semiconductor industry, there exist a number of promising options for emissions control. These options include destruction (comprising combustion, plasma, and chemical-thermal routes), recovery, and process replacement.

scholarly journals Atmospheric Lifetimes, Infrared Absorption Spectra, Radiative Forcings and Global Warming Potentials of NF<sub>3</sub> and CFC-115

2016 ◽  
Author(s):  
Anna Totterdill ◽  
Tamás Kovács ◽  
Wuhu Feng ◽  
Sandip Dhomse ◽  
Christopher J. Smith ◽  
...  
Keyword(s):  
Global Warming ◽  
Cross Sections ◽  
Infrared Absorption ◽  
Radiative Forcing ◽  
Climate Model ◽  
Radiative Forcings ◽  
Atmospheric Window ◽  
Infrared Absorption Spectra ◽  
Global Warming Potentials ◽  
Good Agreement

Abstract. Fluorinated compounds such as NF3 and C2F5Cl (CFC-115) are characterised by very large global warming potentials (GWPs) which result from extremely long atmospheric lifetimes and strong infrared absorptions in the atmospheric window. In this study we have experimentally determined the infrared absorption cross-sections of NF3 and CFC-115, calculated the radiative forcing and efficiency using two radiative transfer models and identified the effect of clouds and stratospheric adjustment. The infrared cross sections are in good agreement with previous measurements, whereas the resulting radiative forcings and efficiencies are, on average, around 10 % larger. A whole atmosphere chemistry-climate model was used to determine the atmospheric lifetimes of NF3 and CFC-115 to be (616 ± 34) years and (492 ± 22) years, respectively. The GWPs for NF3 are estimated to be 14 600, 19 400 and 21 400 over 20, 100 and 500 years, respectively. Similarly, the GWPs for CFC-115 are 6120, 8060 and 8630 over 20, 100 and 500 years, respectively.

Laser Diagnostics of Semiconductor Processing Systems

1984 ◽  
Vol 38 ◽  
Author(s):  
Joda C. Wormhoudt ◽  
Alan C. Stanton ◽  
Joel A. Silver
Keyword(s):  
Gas Phase ◽  
Plasma Etching ◽  
Vapor Deposition ◽  
Laser Diagnostics ◽  
Semiconductor Industry ◽  
Spectroscopic Characterization ◽  
Detection Sensitivity ◽  
Semiconductor Processing ◽  
Laser Techniques

AbstractTwo processes of great importance in the semiconductor industry are vapor deposition and plasma etching. This paper presents a review of laser techniques for spectroscopic characterization of the gas phase species involved in these processes. Band strength and other spectroscopic data for selected molecules are used to give estimates of the detection sensitivity in vibrational and electronic bands. Preliminary results are given from work presently in progress in our laboratory on the detection of such species. The discussion includes examples of the application of these techniques to a number of laboratory deposition and etching devices.

Gas phase UV absorption cross-sections for a series of hydroxycarbonyls

2012 ◽  
Vol 529 ◽  
pp. 16-22 ◽  
Author(s):  
L. Messaadia ◽  
G. El Dib ◽  
A. Ferhati ◽  
E. Roth ◽  
A. Chakir
Keyword(s):  
Gas Phase ◽  
Cross Sections ◽  
Uv Absorption ◽  
Absorption Cross

scholarly journals Atmospheric lifetimes, infrared absorption spectra, radiative forcings and global warming potentials of NF<sub>3</sub> and CF<sub>3</sub>CF<sub>2</sub>Cl (CFC-115)

2016 ◽  
Vol 16 (17) ◽  
pp. 11451-11463 ◽  
Author(s):  
Anna Totterdill ◽  
Tamás Kovács ◽  
Wuhu Feng ◽  
Sandip Dhomse ◽  
Christopher J. Smith ◽  
...  
Keyword(s):  
Global Warming ◽  
Cross Sections ◽  
Infrared Absorption ◽  
Radiative Forcing ◽  
Climate Model ◽  
Intergovernmental Panel ◽  
Radiative Forcings ◽  
Radiative Efficiency ◽  
Atmospheric Window ◽  
Global Warming Potentials

Abstract. Fluorinated compounds such as NF3 and C2F5Cl (CFC-115) are characterised by very large global warming potentials (GWPs), which result from extremely long atmospheric lifetimes and strong infrared absorptions in the atmospheric window. In this study we have experimentally determined the infrared absorption cross sections of NF3 and CFC-115, calculated the radiative forcing and efficiency using two radiative transfer models and identified the effect of clouds and stratospheric adjustment. The infrared cross sections are within 10 % of previous measurements for CFC-115 but are found to be somewhat larger than previous estimates for NF3, leading to a radiative efficiency for NF3 that is 25 % larger than that quoted in the Intergovernmental Panel on Climate Change Fifth Assessment Report. A whole atmosphere chemistry–climate model was used to determine the atmospheric lifetimes of NF3 and CFC-115 to be (509 ± 21) years and (492 ± 22) years, respectively. The GWPs for NF3 are estimated to be 15 600, 19 700 and 19 700 over 20, 100 and 500 years, respectively. Similarly, the GWPs for CFC-115 are 6030, 7570 and 7480 over 20, 100 and 500 years, respectively.

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