Large Area Uniform Deposition of YBa2Cu3O7 Thin Films by a 90° Off-axis Sputtering Technique

1995 ◽  
Vol 401 ◽  
Author(s):  
R. A. Rao ◽  
Q. Gan ◽  
C. B. Eom
Keyword(s):  
Thin Films ◽  
Transition Temperature ◽  
Uniform Thickness ◽  
Superconducting Properties ◽  
Large Area ◽  
Substrate Rotation ◽  
Single Target ◽  
High Transition ◽  
Substrate Position ◽  
Uniform Deposition

AbstractLarge area uniform deposition of Yba2Cu3O7 (YBCO) thin films on 8 inch diameter wafers, using a 3 inch diameter sputtering target and optimized substrate rotation in a single target 90° off-axis sputtering technique, is reported. The variation in thickness, composition and superconducting properties was studied as a function of substrate position on stationary and rotating substrates. The films deposited from a 3” target on rotating substrates displayed uniform thickness (< ±5% variation) and composition (< 2.3% deviation from target stoichiometry) and a consistently high transition temperature ( Tc > 88.3°K) over an 8” diameter area.

Thickness uniformity of large-area double-sided thin films simultaneously deposited with biaxial substrate rotation

2004 ◽  
Vol 22 (4) ◽  
pp. 1134-1138 ◽  
Author(s):  
B. W. Tao ◽  
X. W. Deng ◽  
Y. Zhang ◽  
Y. R. Li
Keyword(s):  
Thin Films ◽  
Large Area ◽  
Thickness Uniformity ◽  
Substrate Rotation

scholarly journals Superconducting properties of very high quality NbN thin films grown by pulsed laser deposition

2019 ◽  
Vol 70 (7) ◽  
pp. 89-94
Author(s):  
Serhii Volkov ◽  
Maros Gregor ◽  
Tomas Roch ◽  
Leonid Satrapinskyy ◽  
Branislav Grančič ◽  
...  
Keyword(s):  
Thin Films ◽  
Transition Temperature ◽  
Superconducting Transition Temperature ◽  
Pulsed Laser ◽  
Domain Size ◽  
Superconducting Transition ◽  
Superconducting Properties ◽  
Si Substrate ◽  
Coherent Domain Size ◽  
Coherent Domain

Abstract In this work, we study the effect of the various substrates on the growth and superconducting properties of NbN thin films grown by using pulsed laser ablation in a N2 + 1%H2 atmosphere on MgO, Al2O3 and Si substrates. Structural and superconducting analyses of the films demonstrate that using MgO and Al2O3 substrates can significantly improve the film properties compared to Si substrate. The X-ray diffraction data indicate that MgO and Al2O3 substrates produce highly oriented superconducting NbN films with large coherent domain size in the out-of plane direction on the order of layer thickness and with a superconducting transition temperature of 13.1 K and 15.2 K, respectively. On the other hand, the NbN film grown on the Si substrate exhibits random polycrystalline orientation. Together with the smallest coherent domain size it leads to the lower critical temperature of 8.3 K. Finally, by using a passivation surface layer we are able to improve superconducting properties of NbN thin film and we observe superconducting transition temperature 16.6 K, the one of the highest value reported so far for 50 nm thick NbN film on sapphire.

Ion-Irradiation Effects in Tl2Ca2Ba2Cu3010 Superconductors

1989 ◽  
Vol 169 ◽  
Author(s):  
J. C. Barbour ◽  
J. F. Kwak ◽  
E. L. Venturini ◽  
D. S. Ginley ◽  
P. S. Peercy
Keyword(s):  
Thin Films ◽  
Transition Temperature ◽  
Ion Irradiation ◽  
Superconducting Properties ◽  
Irradiation Effects ◽  
Atomic Collisions ◽  
Dominant Mechanism ◽  
Resistivity Measurements ◽  
Helium Ion ◽  
Deposited Energy

AbstractThe effects of oxygen and helium ion irradiation on the superconducting properties of Tl2Ca2Ba2Cu3010 thin films were investigated. The transition temperature and width were monitored as a function of ion fluence using both magnetization and resistivity measurements. These data suggest that superconductivity is completely suppressed at 0.020 dpa for both He and 0 ion irradiation. Further, the rate of decrease in Tc as a function of deposited energy showed that the dominant mechanism causing damage-induced suppression of Tc in these films was from atomic collisions.

In‐Situ Growth of Superconducting Bi‐Sr‐Ca‐Cu‐O Thin Films by Activated Reactive Co‐evaporation

1989 ◽  
Vol 169 ◽  
Author(s):  
K. Yoshikawa ◽  
T. Satoh ◽  
N. Sasaki ◽  
M. Nakano
Keyword(s):  
Thin Films ◽  
Surface Roughness ◽  
Transition Temperature ◽  
Smooth Surface ◽  
Oxygen Plasma ◽  
In Situ Growth ◽  
Superconducting Properties ◽  
Cooling Conditions ◽  
Zero Resistance

AbstractThe effect of in‐situ cooling conditions on surface roughness and superconducting properties have been studied. Bi‐Sr‐Ca‐Cu‐0 thin films were grown in‐situ on (100) MgO substrates at 700°C by activated reactive co‐evaporation. The films cool‐down in 760 Torr oxygen showed a transition temperature (Tc(onset)) of 100 K and zero resistance temperature (Tc (zero)) of 65 K. Smooth surface was obtained for the sample cooled‐down in oxygen plasma.

Reproducible technique for fabrication of thin films of high transition temperature superconductors

1987 ◽  
Vol 51 (21) ◽  
pp. 1753-1755 ◽  
Author(s):  
P. M. Mankiewich ◽  
J. H. Scofield ◽  
W. J. Skocpol ◽  
R. E. Howard ◽  
A. H. Dayem ◽  
...  
Keyword(s):  
Thin Films ◽  
Transition Temperature ◽  
High Transition Temperature ◽  
Reproducible Technique ◽  
High Transition

METHODS FOR PULSED LASER DEPOSITION OF LARGE-AREA FILMS USING MORE THAN ONE TARGET

2012 ◽  
Vol 15 ◽  
pp. 170-178
Author(s):  
A.A. KUZANYAN ◽  
V.A. PETROSYAN ◽  
A.S. KUZANYAN
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Functional Materials ◽  
Coated Conductors ◽  
Laser Deposition ◽  
Uniform Thickness ◽  
Large Area ◽  
Average Value ◽  
Modern Technologies

Several new methods of pulsed laser deposition for fabricating large-area thin films of uniform thickness and composition on a rotating substrate and onto a moving ribbon are proposed. The peculiarities of the methods are the laser deposition of a compound upon a substrate through a diaphragm or the mask placed in immediate proximity of the substrate together with a use of more than one target. The proposed method makes it possible to obtain thin films of uniform thickness on substrates with sizes limited only by the deposition chamber size. Some of the methods are experimentally verified by depositing CuO thin films and the deviation of the film thickness from the average value does not exceed ±3%. Given the advantage of laser deposition, the offered methods should find practical use, in particular, in micro-electronics, optical industry, development of superconducting coated conductors, deposition of thin films of functional materials and other modern technologies.

Homogeneity measurements of transition temperature and critical current density of large area HTSC thin films

1997 ◽  
Vol 282-287 ◽  
pp. 2377-2378
Author(s):  
X.H. Jiang ◽  
Z.X. Zhao ◽  
H.C. Li ◽  
R.L. Wang ◽  
Y.L. Zhou
Keyword(s):  
Thin Films ◽  
Transition Temperature ◽  
Critical Current Density ◽  
Critical Current ◽  
Current Density ◽  
Large Area ◽  
Htsc Thin Films

Sputter Deposition of High Transition Temperature Ti-Ni-Hf Alloy Thin Films

1995 ◽  
Vol 05 (C8) ◽  
pp. C8-783-C8-787 ◽  
Author(s):  
A.D. Johnson ◽  
V.V. Martynov ◽  
R.S. Minners
Keyword(s):  
Thin Films ◽  
Transition Temperature ◽  
High Transition Temperature ◽  
Sputter Deposition ◽  
High Transition

Minimizing Film Stress and Degradation in Thin-Film Niobium Superconducting Cables

2017 ◽  
Vol 2017 (DPC) ◽  
pp. 1-25
Author(s):  
Vaibhav Gupta ◽  
John A. Sellers ◽  
Charles D. Ellis ◽  
Bhargav Yelamanchili ◽  
Simin Zou ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Transition Temperature ◽  
Critical Current ◽  
Vital Role ◽  
Curing Temperature ◽  
Film Stress ◽  
Superconducting Properties ◽  
Al Thin Film ◽  
Superconducting Cables

The future of superconducting and cryogenic electronic systems can significantly benefit from densely integrated superconducting multi-layer and multi-signal flexible cables due to the massive number of electrical interconnects needed in systems such as superconducting quantum computers and cryogenic detector arrays. In order to maintain superconductivity in niobium (Nb) thin films, film stress and degradation must be minimized. We are working towards configurations with embedded traces, where it is expected that the superconductor material will be subjected to subsequent fabrication steps that must not degrade the properties of the superconductor. We previously observed degradation of the superconducting properties of Nb, such as reduction of both transition temperature and critical current, as a result of curing a polyimide passivation layer at supplier recommended curing temperature (350 oC). The deterioration in the superconducting properties may be due to mechanical stress in the film or diffusion of impurities into the Nb during the curing process Film stress plays a vital role in the superconducting properties of Nb. Previous research by other groups has focused on in situ ion bombardment, substrate fixturing and wafer preparation in order to minimize film stress. In this work, we discuss the role of argon (Ar) pressure and power during Nb sputtering on the quality of Nb and Nb/Al thin films. By varying the Ar pressure and applied power during sputter deposition, we have produced both tensile and compressive films on flexible substrates in order to find the pressure that yields a near zero stress Nb and Nb/Al thin film at room temperature. A low stress Nb film was tested with a thin Al barrier layer (of the order of 10's of nm) between Nb and polyimide to protect the Nb superconductivity during the PI curing step. Nb traces with a thickness of roughly 250nm and a width of 50um were used for this work. Nb films deposited at different Ar pressures and power levels were tested for critical transition temperature (Tc), critical current (Ic), and sheet resistance (Ω/□), to compare the superconducting behavior of different Nb films. Details of the fabrication processes, experimental procedures and performance results will be presented. This work will help determine materials stacks-ups that may be useful for future multi-layer Nb-based flexible superconducting cables. Acknowledgment: We gratefully acknowledge financial support and technical guidance from Microsoft Research for this work.

Large Area Thin Films of Highly Uniform Thickness Vacuum Deposited in a Stationary System

1974 ◽  
Vol 13 (S1) ◽  
pp. 471 ◽  
Author(s):  
Helmut J. Schwarz ◽  
Roy C. McCord ◽  
Albert Nerken
Keyword(s):  
Thin Films ◽  
Stationary System ◽  
Uniform Thickness ◽  
Large Area ◽  
Highly Uniform
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