Reactivation of Acceptors and Trapping of Hydrogen in GaN/InGaN Double Heterostructures
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ABSTRACTThe apparent thermal stability of hydrogen passivated Mg acceptors in GaN is a function of the annealing ambient employed, with H2 leading to a reactivation temperature approximately 150°C higher than N2. The dissociation of Mg-H complexes and the loss of hydrogen from GaN are sequential processes, with reactivation occurring at ≤700°C for annealing under N2, while significant concentrations of hydrogen remain in the crystal even at 900°C in implanted samples. The hydrogen is gettered to regions of highest defect density such as the InGaN layer in a GaN/InGaN double heterostructure. The addition of an accelerating potential for 2H+ ions in the plasma did not greatly affect the deuterium profiles.
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