Fabrication of Micron Scale Magnetic Nickel Features by Selective Area Organometallic Chemical Vapor Deposition

We demonstrate that it is possible to deposit a wide range of magnetic features, using photoassisted and electron radiation induced selective area organometallic chemical vapor deposition. Large arrays of identical micron to nano scale Ni features were deposited by these methods. Their magnetic properties were studied by alternating gradient force magnetometry as well as magnetic force microscopy. Our morphological and magnetic measurements show that the structures are spatially well defined, and the magnetic properties are related to the structural shapes of the features.