Model for Estimation of Metallization Lifetime Including Electromigration and Thermo-Mechanical Stress Relaxation

1998 ◽  
Vol 516 ◽  
Author(s):  
Herbert F. Roloff ◽  
Johannes Fellinger

AbstractFuture semiconductor technologies with structural dimensions less than 0.35 µm and four or more metallization layers impede the realization of the reliability requirements due to their complexity and increasing operating conditions (>5 mA/µm2). Therefore it is necessary to provide reliability appraisal methods which ensure the operation lifetimes (up to 30 years) required by the market.

Author(s):  
Smith Salifu ◽  
Dawood A. Desai ◽  
Schalk Kok

The creep response and stress relaxation of X20 CrMoV12-1 steam piping under diverse operating conditions were simulated using finite element analysis (FEA) code, Abaqus alongside fe-safe/Turbolife software. In the study, steady-state creep and creep analysis characterized by 24 hours daily cycle consisting of a total of 6 hours peak, 4 hours transient and 14 hours off-peak period was considered. Modified hyperbolic sine creep model used in the analysis was implemented in Abaqus via a special creep user-subroutine to compute the stress relaxation and creep behaviour, while the useful service life and creep damage was estimated using fe-safe/Turbolife. The optimum creep strain, stress, damage, and worst life were found at the intrados of the piping, with the steady-state analysis having a higher useful creep life and slower creep damage accumulation. Furthermore, slower stress relaxation with faster damage accumulation was observed in the analysis involving cycles. Finally, a good agreement was obtained between the analytical calculated and simulated rates of the piping.


Author(s):  
Andrew Moffat ◽  
Richard Green ◽  
Calum Ferguson ◽  
Brent Scaletta

Abstract There is a drive towards a broader range of fuels in industrial gas turbines, with higher levels of sulphur and potentially hydrogen. Due to these harsher environments, there is also a drive for corrosion resistant alloys and coatings. A number of key corrosion resistant superalloys, which are being employed to cope with these evolving conditions, exhibit primary creep. It is therefore imperative that fundamental material models, such as those for creep deformation, are developed to ensure they can accurately predict the material response to evolving operating conditions. The requirements for a creep model are complex. The model must be able to: predict forward creep deformation in regions dominated by primary loads (such as pressure); predict stress relaxation in regions dominated by secondary loads (such as differential thermal expansion); predict the effects of different creep hardening mechanisms. It is also clear that there is an interaction between fatigue and creep. With flexible operation, this interaction can be significant and should be catered for in lifing methods. A model that has the potential to account for the effect of plasticity on creep, and creep on plasticity is therefore desirable. In previous work the authors presented the concept for a backstress model to predict creep strain rates in superalloys. This model was fitted to a limited dataset at a single temperature. The approach was validated using simple creep-dwell tests at the same temperature. This paper expands on the previous work in several ways: 1) The creep model has been fitted over a wide range of temperatures. Including the effect of temperature in complex creep models presents a number of difficulties in model fitting and these are explored. 2) The model was fitted to constant load (forward creep) and constant strain (stress relaxation) tests since any creep model should be able to predict both forms of creep deformation. However, these are often considered separately due to the difficulty of fitting models to two different datasets. 3) The creep deformation model was validated on stress change tests to ensure the creep deformation response can cope with changes in response variables. 4) The approach was validated using creep-fatigue tests to show that the creep deformation model, in addition to our established fatigue models, can predict damage in materials under complex loading.


1996 ◽  
Vol 436 ◽  
Author(s):  
J. P. Lokker ◽  
J. F. Jongste ◽  
G. C. A. M. Janssen ◽  
S. Radelaar

AbstractMechanical stress and its relaxation in aluminum metallization in integrated circuits (IC) are a major concern for the reliability of the material. It is known that adding Cu improves the reliability but complicates plasma etching and increases corrosion sensitivity. The mechanical behavior of AlVPd, AlCu and Al blanket films is investigated by wafer curvature measurements. During thermal cycling between 50°C and 400°C the highest tensile stress is found in AlVPd. In a subsequent experiment, the cooling was interrupted at several temperatures to investigate the stress behavior during an eight hour isothermal treatment. Isothermal stress relaxation has been observed in the three types of films and is discussed.


1993 ◽  
Vol 33 (11-12) ◽  
pp. 1841-1844 ◽  
Author(s):  
G.L. Baldini ◽  
A. Scorzoni ◽  
F. Tamarri

1991 ◽  
Vol 64 (2) ◽  
pp. 89-93 ◽  
Author(s):  
T. F. Nonnenmacher ◽  
W. G. Glöckle

1978 ◽  
Vol 34 (3) ◽  
pp. T99-T105
Author(s):  
Masayoshi Hagiwara ◽  
Keizo Miyasaka ◽  
Kinzo Ishikawa

Author(s):  
Edward Hares ◽  
Mahmoud Mostafavi ◽  
Richard Bradford ◽  
Chris Truman

Motivated by the need to more accurately account for real, in-service, operating conditions, this paper aims to investigate whether creep strain accumulated at different strain rates is equally damaging. Previous research has suggested that creep strain is more damaging when accumulated more slowly in creep of notched bars. The research presented here seeks to address this question by considering the accumulation of creep strain during stress relaxation of notched bars. Repeat stress relaxation tests with varying dwell lengths were conducted so that the relative damaging effects of the early, rapid accumulation and later, slow accumulation of creep strains could be compared. Another aim was to determine how a lower test temperature affects this creep strain accumulation. In repeat relaxation tests the load is reestablished repeatedly after relaxation dwells of equal duration, until rupture of the specimen occurs. The material used was an ex-service powerplant stainless steel Type 316H. Notched bar specimens were used to introduce stress triaxiality at the notch tip to imitate the multiaxial loads plant components are subjected to during in-service operation. The stresses and strains in the specimens were then assessed using finite element analysis; a user subroutine was implemented so the onset and propagation of creep damage could be simulated throughout the specimens’ creep life. The research found that the material in question had a lower creep ductility at 515°C than at 550°C. The research also showed that creep strain accumulated rapidly at the start of a dwell is significantly less damaging than creep strain accumulated more slowly towards the end of the dwell.


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