Temperature Measurement and Control in a Rapid Thermal Processor

1985 ◽  
Vol 52 ◽  
Author(s):  
Ronald E. Sheets

ABSTRACTRapid Thermal Processing (RTP) of silicon or other semiconductor materials requires accurate measurement and control of temperature. In a typical RTP cycle, heating of the wafer takes place in seconds, making accurate control of the wafer temperature very critical. Non contact wafer temperature sensing is achieved using an optical pyrometer. Precise temperature control from 400° C to 1350° C is maintained with a closed loop control system consisting of an optical pyrometer and a computer. Sources of errors due to variations in emissivity as a function of wafer temperature, surface conditions and background radiation are discussed. Calibration of the system is achieved by using a thermocouple instrumented wafer.

2013 ◽  
Vol 312 ◽  
pp. 762-765
Author(s):  
Jun Zhong Guo ◽  
Tian Tian Cai ◽  
Shi Ying Zhao

In this paper, the single and double eccentric combination of pressure regulation device in the offset press was as the object. A closed loop control system of printing pressure and a following pressure regulation device were designed. The rotation angle of eccentric bearing in plate cylinder and the length change of regulating screw were worked out by means of the vector relationship of pressure regulation. The influence on printing quality from the pressure regulation device was analyzed, and it provided a certain basis for the regulation and control of printing pressure.


Author(s):  
M Mailah ◽  
H Jahanabadi ◽  
M Z M Zain ◽  
G Priyandoko

This article focuses on the modelling and control of a two-link planar mechanical manipulator that emulates a human arm. The simplicity of the control algorithm and its ease of computation are particularly highlighted in this study. The arm is subjected to a vibratory excitation at a specific location on the arm while performing trajectory tracking tasks in two-dimensional space, taking into account the presence of ‘muscle’ elements that are mathematically modelled. A closed-loop control system is applied using an active force control strategy to accommodate the disturbances based on a predefined set of loading and operating conditions to observe the system responses. Results of the study imply the effectiveness of the proposed method in compensating the vibration effect to produce robust and accurate tracking performance of the system. The results may serve as a useful tool in aiding the design and development of a tooling device for use in a mechatronic robot arm or even human arm (smart glove) where precise and/or robust performance is a critical factor and of considerable importance.


2019 ◽  
Vol 23 (4) ◽  
pp. 362
Author(s):  
Sayuti Syamsuar

Many of aircraft perfonnance became from the stability and control of flight test data analysis. This paper introduces the Kalman Filter analysis on the Boeing 747 data aircraft to knawn the output response if disturbance (as turbulence or noise) absence on the closed loop control system. We found the output response of the plant on algorithm Kalman Filter tend to the unstable conditions, but we don't knaw the response of the whole of closed loop diagram block control system of Boeing 747 aircraft.Keywords : aircraft control system, turbulence, Kalman Filter


2021 ◽  
Vol ahead-of-print (ahead-of-print) ◽  
Author(s):  
Shangyong Tang ◽  
Guilan Wang ◽  
Hao Song ◽  
Runsheng Li ◽  
Haiou Zhang

Purpose Modeling and control of bead geometry in wire and arc additive manufacturing is significant as it affects the whole manufacturing process. The purpose of this paper is to establish an efficient model to control the bead geometry with fewer experiments in wire and arc additive manufacturing (WAAM). Design/methodology/approach A multi-sensor system is established to monitor the process parameters and measure the bead geometry information. A dynamic parameters experimental method is proposed for rapid modeling without dozens of experiments. A deep learning method is used for bead modeling and control. To adaptively control the bead geometry in real-time, a closed-loop control system was developed based on the bead model and in situ monitoring. Findings A series of experiments were conducted to train, test and verify the feasibility of the method and system, and the results showed that the proposed method can build the bead model rapidly with high precision, and the closed-loop system can control the forming geometry adaptively. Originality/value The proposed modeling method is novel as the experiment number is reduced. The dynamic parameters experimental method is effective with high precision. The closed-loop control system can control the bead geometry in real-time. The forming accuracy is elevated.


Author(s):  
Wen Zeng ◽  
Hai Fu ◽  
Songjing Li

To predict the size of droplets formed by pressure-driven flows, the droplet size as a nonlinear function of the pressure ratio is measured experimentally. The mathematical model of the pressure-driven microfluidic device is established, and by varying the volume of a container, comparative and quantitative measurements of the response speed and control accuracy of pressure-driven flows are presented. In particular, a closed-loop control system with feedback of the driven pressure is demonstrated, and the deviation between the measured and the predicted value of the driven pressure can be eliminated by using a PI controller. As a result, by accurately controlling the driven pressure of pressure-driven flows, monodisperse droplets with a desired size can be formed for pressure-driven microdroplet generators.


2016 ◽  
Vol 4 (2) ◽  
pp. 1-16
Author(s):  
Ahmed S. Khusheef

 A quadrotor is a four-rotor aircraft capable of vertical take-off and landing, hovering, forward flight, and having great maneuverability. Its platform can be made in a small size make it convenient for indoor applications as well as for outdoor uses. In model there are four input forces that are essentially the thrust provided by each propeller attached to each motor with a fixed angle. The quadrotor is basically considered an unstable system because of the aerodynamic effects; consequently, a close-loop control system is required to achieve stability and autonomy. Such system must enable the quadrotor to reach the desired attitude as fast as possible without any steady state error. In this paper, an optimal controller is designed based on a Proportional Integral Derivative (PID) control method to obtain stability in flying the quadrotor. The dynamic model of this vehicle will be also explained by using Euler-Newton method. The mechanical design was performed along with the design of the controlling algorithm. Matlab Simulink was used to test and analyze the performance of the proposed control strategy. The experimental results on the quadrotor demonstrated the effectiveness of the methodology used.


2011 ◽  
Vol 219-220 ◽  
pp. 3-7
Author(s):  
Ning Zhang ◽  
Rong Hua Liu

An expert control system based on transient response patterns and expert system techniques is proposed in this paper. Depending on the features of the closed-loop control system determines the control decision and adjusts the parameters of the controller. The proposed method requires minimal proper information about the controlled plant and, with the linear re-excitation learning method, the system is kept satisfying the performance criterion.


Sign in / Sign up

Export Citation Format

Share Document