Bonding in Ion-Implanted Carbon Films Characterized by TEM Spectrum Lines and Energy-Filtered Imaging

1999 ◽  
Vol 589 ◽  
Author(s):  
J. Bentley ◽  
K.C. Walter ◽  
N.D. Evans
Keyword(s):  
Energy Shift ◽  
Carbon Films ◽  
Binding Energies ◽  
Diamond Like Carbon ◽  
Nitrogen Implantation ◽  
Electron Energy Loss Spectrometry ◽  
Spectrum Imaging ◽  
Binding Energy Shift ◽  
Electron Energy Loss ◽  
Ion Implanted

AbstractIon-implanted diamond-like carbon (DLC) films have been characterized by techniques based on electron energy-loss spectrometry using an imaging energy filter on a 300kV TEM. Nitrogen implantation results in increased sp2 bonding and a 1.3 eV shift to higher binding energies for carbon-K. Argon implantation results in a smaller increase in sp2bonding with no detectable binding energy shift. The fraction of implanted species retained is much smaller for Ar than for N. Differences in behavior between N- and Ar-implanted DLC are consistent with expected chemical reactions. Preliminary results demonstrate the feasibility of mapping the Φ*/σ* intensity (sp2/sp3) ratio by energy-filtered TEM as an alternative to spectrum imaging in STEM mode

Optical and electronic properties of nitrogen-implanted diamond-like carbon films

1994 ◽  
Vol 9 (1) ◽  
pp. 85-90 ◽  
Author(s):  
G.L. Doll ◽  
J.P. Heremans ◽  
T.A. Perry ◽  
J.V. Mantese
Keyword(s):  
Amorphous Carbon ◽  
Carbon Film ◽  
Film Surface ◽  
Carbon Films ◽  
Localized States ◽  
Diamond Like Carbon ◽  
Nitrogen Implantation ◽  
Electrical Measurements ◽  
Nitrogen Ion ◽  
Ion Implanted

Optical and electrical measurements on nitrogen ion-implanted diamond-like carbon films are presented. Raman scattering measurements, which probe the crystallinity of the film surface, indicate that nitrogen implantation reduces the finite crystallographic order in the pristine carbon films. The absence of molecular vibrations in the infrared absorption spectra of the films argues against a polymeric structure of the ion-implanted films. Spectroscopic ellipsometry experiments determine the change in the optical constants of the carbon film due to nitrogen implantation. Electrical de conductivity measurements are interpreted within the framework of a schematic density of states picture of graphitic τ-electrons in an amorphous carbon system. Taken collectively, the optical and electrical measurements suggest that nitrogen implantation increases the density of localized states within the 1.5 eV bandgap of the quasi-amorphous carbon film, thereby reducing the bandgap and increasing the conductivity of the nitrogen-implanted films.

scholarly journals Deposition of Dlc Via Intense Ion Beam Ablation

1993 ◽  
Vol 316 ◽  
Author(s):  
Gregory P. Johnston ◽  
Prabhat Tiwari ◽  
Donald J. Rej ◽  
Harold A. Davis ◽  
William J. Waganaar ◽  
...  
Keyword(s):  
Pulse Width ◽  
Ion Beam ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Carbon Ions ◽  
Graphite Target ◽  
Deposition Rates ◽  
Micron Size ◽  
Electrical Resistivities ◽  
Electron Energy Loss

ABSTRACTDiamond-like carbon films were prepared by high intensity pulsed ion beam ablation of graphite targets. A 350 keV, 35 kA, 400 ns pulse width beam, consisting primarily of carbon ions and protons, was focused onto a graphite target at a fluence of 15-45 J/cm2. Films were deposited onto substrates positioned in an angular array from normal to the target to 90° off normal. Deposition rates up to 30 nm per pulse, corresponding to an instantaneous deposition rate greater than 1 mm/sec, have been observed. Electrical resistivities between 1 and 1000 ohm·cm were measured for these films. XRD scans showed that no crystalline structure developed in the films. SEM revealed that the bulk of the films contain material with feature sizes on the order of 100 nm, but micron size particles were deposited as well. Both Raman and electron energy loss spectroscopy indicated significant amounts of sp3 bonded carbon present in most of the films.

Characterization of hard carbon films by electron energy loss spectrometry

1979 ◽  
Vol 61 (2) ◽  
pp. L1-L4 ◽  
Author(s):  
Chr. Weissmantel ◽  
K. Bewilogua ◽  
C. Schürer ◽  
K. Breuer ◽  
H. Zscheile
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Carbon Films ◽  
Hard Carbon ◽  
Electron Energy Loss Spectrometry ◽  
Electron Energy Loss

Tribological properties of graded diamond-like carbon films on Ti ion-implanted aluminum substrate

2008 ◽  
Vol 17 (11) ◽  
pp. 1844-1849 ◽  
Author(s):  
Ming Xu ◽  
Xun Cai ◽  
Youming Liu ◽  
Shihao Pu ◽  
Paul K. Chu
Keyword(s):  
Tribological Properties ◽  
Carbon Films ◽  
Aluminum Substrate ◽  
Diamond Like Carbon ◽  
Ion Implanted

Bonding in Ion-Implanted Diamond-Like Carbon Films Characterized by TEM Spectrum Lines and Energy-Filtered Imaging

2000 ◽  
Vol 6 (S2) ◽  
pp. 154-155 ◽  
Author(s):  
J. Bentley ◽  
K.C. Walter ◽  
N.D. Evans
Keyword(s):  
Plasma Deposition ◽  
Incident Beam ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Elemental Distribution ◽  
Distribution Maps ◽  
Window Method ◽  
User Facility ◽  
Elemental Maps ◽  
Ion Implanted

Many of the electrical, mechanical, and electrochemical properties of diamond-like carbon (DLC) coatings are determined by the amount of sp3 bonding. Correlations of bonding and properties are important in efforts to optimize coatings for specific applications. DLC thin films were grown at LANL by plasma deposition and subsequently ion implanted with N or Ar. Cross-sectioned TEM specimens were characterized with a Gatan imaging filter (GIF) interfaced to a LaB6 Philips CM30T at the ORNL SHaRE User Facility. For elemental distribution maps the following conditions were used: incident beam divergence α = 2.9 mrad, collection angle β = 4.8 mrad, slit width ΔE = 30 eV, exposure times of typically 5 s, 2x-binned 512×512 images, and TEM magnification ∼2000. The standard 3-window method was used for producing elemental maps with AE-r background extrapolation; 2-window jump-ratio images were also produced.

Spectrum Imaging: Microanalysis for a New Millennium

2000 ◽  
Vol 6 (S2) ◽  
pp. 1048-1049
Author(s):  
I.M. Anderson
Keyword(s):  
New Paradigm ◽  
Full Spectrum ◽  
X Ray ◽  
Analysis Techniques ◽  
Electron Energy Loss Spectrometry ◽  
Spectrum Imaging ◽  
Electron Imaging ◽  
Distinct Features ◽  
Electron Energy Loss ◽  
Field Imaging

Spectrum imaging, where a full spectrum is acquired at each pixel in a two-dimensional array, provides a new paradigm for materials characterization that combines the advantages of traditional paradigms for imaging and analysis in electron optical characterization. Traditionally, electron optical imaging (e.g., secondary electron imaging of electron-opaque or bright-field imaging of electron-transparent specimens) emphasizes contrast production among distinct features of the microstructure. An excellent survey of the specimen microstructure is achieved - many pixels are acquired - but typically no quantitative analysis of image intensities is performed. In contrast, electron optical analysis techniques traditionally concentrate on quantitative elemental analysis (e.g., electron probe microanalysis), or at least comprehensive qualitative analysis through full spectrum acquisition (e.g., energy-dispersive X-ray or electron energy-loss spectrometry). However, these analyses are typically performed at only a few locations on the specimen, which are pre-selected on the basis of the image contrast generated as described above.

scholarly journals Bias in bonding behavior among boron, carbon, and nitrogen atoms in ion implanted a-BN, a-BC, and diamond like carbon films

2011 ◽  
Vol 110 (7) ◽  
pp. 074906 ◽  
Author(s):  
Mustafa Fatih Genisel ◽  
Md. Nizam Uddin ◽  
Zafer Say ◽  
Mustafa Kulakci ◽  
Rasit Turan ◽  
...  
Keyword(s):  
Carbon Films ◽  
Diamond Like Carbon ◽  
Carbon And Nitrogen ◽  
Boron Carbon ◽  
Ion Implanted
Sign in / Sign up

Export Citation Format

Share Document