Solid Solution Alloy Effects on Microstructure and Indentation Hardness in Pt-Ru Thin Films
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ABSTRACTThe elastic moduli and flow stresses of as-deposited Pt and Pt-Ru solid solution thin films were investigated by the nanoindentation method. The influence of solid solution alloying was explored by depositing Pt-Ru solid solution thin films with various compositions onto Si substrates. The 200 nm films were prepared by DC magnetron cosputtering with a Ru composition range from 0 to 20wt%. As expected, the modulus and the flow stress both increased significantly with an increase in Ru. The experimental results compare favorably to predictions based on a simple dislocation motion model consisting of three strengthening terms: substrate constraint, grain size strengthening and solid solution strengthening.
2005 ◽
Vol 96
(11)
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pp. 1237-1241
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2016 ◽
Vol 838-839
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pp. 344-349
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1980 ◽
Vol 19
(11)
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pp. L714-L716
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2015 ◽
Vol 817
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pp. 307-311
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2017 ◽
Vol 700
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pp. 301-311
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