Investigation of Metal/GaAs Reactions by Heavy Ion Rutherford Backscattering Spectrometry(HIRBS)

1986 ◽  
Vol 69 ◽  
Author(s):  
Kin Man Yu ◽  
J. M. Jaklevic ◽  
E. E. Haller

AbstractThermally activated metallurgical reactions between GaAs and various metals of potential importance in contact structures were studied using Heavy Ion Rutherford Backscattering Spectrometry (HIRBS). The improved mass resolution obtained with heavy ions (160) as projectiles for backscattering measurements facilitated the identification of the various intermetallic compounds formed on GaAs. The metal/GaAs systems investigated in this study included Pt/GaAs, Pd/GaAs, and Ni/GaAs. Three different binary compounds were formed in the Pt/GaAs system during annealing. Complete reaction between 1200Å of Pt and GaAs was observed after annealing at 500°C for 20 min. Reactions in Pd/GaAs and Ni/GaAs systems were, however, very different from that of Pt/GaAs. Both Pd and Ni formed ternary compounds with GaAs. Detailed information on the various compound compositions of the three systems as measured by HIRBS is presented. Comparisons of results on similar systems obtained by using other analytical techniques are discussed.

1983 ◽  
Vol 27 ◽  
Author(s):  
G. W. Arnold

ABSTRACTIon implantation causes alkali migration to the surface in alkali silicate glasses. Rutherford backscattering spectrometry was used to follow this depletion. Room temperature implantations of 5×1016 250 keV Xe/cm2 in 12M20·88SiO2 (M = Li,Na,K,Rb,Cs) removes approximately equal numbers (within a factor of 2) of alkali from the glass. Low temperature (77K) implants significantly reduce the alkali loss. These results imply a radiationenhanced diffusion mechanism in which the alkali interchanges with the products of the collision cascade, with the kinetics being limited by the radiation damage components. The results for mixed-alkali glasses ((12−x)M2O·xCs20·88Si02) give further evidence for this process. In glass/'metal couples, radiation enhanced diffusion allows the interchange of glass network components with deposited metals. Rutherford backscattering spectrometry was used to follow the interchange of silicate and phosphate glass components with metal ions near the heavy-ion implanted interface between glass substrate and metal (Al,Zr) films.


2006 ◽  
Vol 94 (6-7) ◽  
Author(s):  
Sumit Kumar ◽  
Neetika Rawat ◽  
A. Bhattacharya ◽  
B. S. Tomar ◽  
V. K. Shrikhande ◽  
...  

SummaryHeavy ion Rutherford backscattering spectrometry, with 30 MeV


1997 ◽  
Vol 504 ◽  
Author(s):  
M. J. Giacobbe ◽  
L. E. Rehn ◽  
N. Q. Lam ◽  
P. R. Okamoto ◽  
L. Funk ◽  
...  

ABSTRACTThe interactions of cascade remnants with freely migrating defects (FMDs) during dual light and heavy-ion irradiations in Cu-lat.%Au at 400°C were investigated using Rutherford backscattering spectrometry. Near-surface Au depletion driven by 1.5-MeV He ion irradiation was suppressed by concurrent bombardment with 1.2-MeV Ag ions. The dual irradiation effect suggests that shortlived cascade remnants created by heavy ions act as recombination centers for FMDs, reducing radiation-induced segregation (RIS). The effects of the total cascade volume generated by heavyion beams on the suppression of RIS were examined. The investigation revealed when 800-keV Cu and 1.2-MeV Ag ion beams produce nearly the same total cascade volume per second, their suppression effects on 1.5-MeV He-induced Au transport are also nearly equal even though the total cascade volume produced per ion for each are different. This result indicates that the suppression effect of cascade remnants produced by heavy ions depends on the total cascade volume induced per unit time and not on the total cascade volume per ion generated by individual ions of different mass and energy.


1983 ◽  
Vol 27 ◽  
Author(s):  
L. Salamanca-Riba ◽  
B.S. Elman ◽  
M.S. Dresselhaus ◽  
T. Venkatesan

ABSTRACTRutherford backscattering spectrometry (RBS) is used to characterize the stoichiometry of graphite intercalation compounds (GIC). Specific application is made to several stages of different donor and acceptor compounds and to commensurate and incommensurate intercalants. A deviation from the theoretical stoichiometry is measured for most of the compounds using this non-destructive method. Within experimental error, the RBS results agree with those obtained from analysis of the (00ℓ) x-ray diffractograms and weight uptake measurements on the same samples.


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