Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation
2021 ◽
Vol 39
(6)
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pp. 063222
2010 ◽
Vol 645-648
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pp. 701-704
2006 ◽
Vol 249
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2019 ◽
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pp. 300-305
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1978 ◽
Vol 125
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pp. 1215-1218
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1999 ◽
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pp. 292-296
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