Development of Scanning Microwave Microscope for High-Throughput Characterization of Combinatorial Dielectric Thin Film

2001 ◽  
Vol 700 ◽  
Author(s):  
Noriaki Okazaki ◽  
Parhat Ahmet ◽  
Toyohiro Chikyow ◽  
Hiroyuki Odagawa ◽  
Yasuo Cho ◽  
...  
Keyword(s):  
Thin Film ◽  
Dielectric Constant ◽  
Frequency Shift ◽  
High Throughput ◽  
Accurate Determination ◽  
Dielectric Materials ◽  
Dielectric Thin Film ◽  
Outer Conductor ◽  
Microwave Microscope

AbstractA scanning microwave microscope (Sm M) for high-throughput characterization of combinatorial dielectric materials has been developed using a lumped constant resonator probe. The probe consists of a microwave oscillator module equipped with a thin conducting needle and an outer conductor ring, which detects the dielectric constant of the sample just beneath the needle as a frequency shift of the resonator. The quantitative analysis of the dielectric constant for the bulk and the thin-film samples was carried out based on the measurement of gap-length dependence of the frequency shift. The analysis method was successfully applied to the characterization of composition-spread BaxSr1-xTiO3 thin film sample. The evaluation of far-field contribution to the frequency shift was found to be crucial for the accurate determination of dielectric constant especially in the characterization of combinatorial thin films.

High-throughput characterization of local conductivity of Nd0.9Ca0.1Ba2Cu3O7−δ thin film by the low-temperature scanning microwave microscope

2006 ◽  
Vol 252 (7) ◽  
pp. 2615-2621 ◽  
Author(s):  
Sohei Okazaki ◽  
Noriaki Okazaki ◽  
Xiaoru Zhao ◽  
Hidetaka Sugaya ◽  
Sei-ichiro Yaginuma ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
High Throughput ◽  
Microwave Microscope ◽  
Local Conductivity ◽  
Temperature Scanning

Development of scanning microwave microscope with a lumped-constant resonator probe for high-throughput characterization of combinatorial dielectric materials

2002 ◽  
Vol 189 (3-4) ◽  
pp. 222-226 ◽  
Author(s):  
Noriaki Okazaki ◽  
Hiroyuki Odagawa ◽  
Yasuo Cho ◽  
Toshihiko Nagamura ◽  
Daisuke Komiyama ◽  
...  
Keyword(s):  
High Throughput ◽  
Dielectric Materials ◽  
Lumped Constant ◽  
Microwave Microscope

Recursive Image Charge Approach for Quantitative Characterization of Dielectric Thin Film Library Using Scanning Tip Microwave Near-field Microscopy

2003 ◽  
Vol 804 ◽  
Author(s):  
Chen Gao ◽  
Bo Hu ◽  
Mengming Huang ◽  
Pu Zhang ◽  
Wen-han Liu
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Dielectric Constant ◽  
Near Field ◽  
Image Charge ◽  
Film Library ◽  
Quantitative Characterization ◽  
Dielectric Thin Films ◽  
Dielectric Thin Film

ABSTRACTWe developed a recursive image charge approach for quantitative characterizations of dielectric thin films using the scanning tip microwave near-field microscope. With this method, frequency shift of the microscope as functions of the dielectric constant and the thickness of a film can be effectively computed in a recursive way. We believe that this approach can promote the high-throughput characterization of the dielectric libraries.

Combinatorial Fabrication and High-Throughput Characterization of Thin Film Metal Oxide Libraries for Solar water Splitting

2018 ◽  
Author(s):  
Alfred Ludwig ◽  
Mona Nowak ◽  
Swati Kumari ◽  
Helge S. Stein ◽  
Ramona Gutkowski ◽  
...  
Keyword(s):  
Thin Film ◽  
Metal Oxide ◽  
Water Splitting ◽  
High Throughput ◽  
Solar Water ◽  
Solar Water Splitting

Dielectric Characterization of Polyceram Films

1990 ◽  
Vol 180 ◽  
Author(s):  
G. Teowee ◽  
J.M. Boulton ◽  
H.H. Fox ◽  
A. Koussa ◽  
T. Gudgel ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Polyethylene Oxide ◽  
Dielectric Materials ◽  
Inorganic Materials ◽  
Functionalized Polymers ◽  
Multifunctional Materials ◽  
Dielectric Characterization ◽  
Silicon Alkoxides ◽  
Tan Δ

ABSTRACTPolycerams are an emergent class of hybrid, multifunctional materials which combine the properties of organic and inorganic materials. Films have been prepared from silicon alkoxides and reactive, functionalized polymers such as triethoxysilyl modified polybutadiene (MPBD), (N-triethoxysilylpropyl)O polyethylene oxide urethane (MPEOU) and trimethoxysilylpropyl substituted polyethyleneimine (MPEI). Characterization of dielectric constant and tan δ of the films has been carried out over a range of frequency from 500 Hz to 100 kHz; and the results are used to consider the potential of Polycerams as dielectric materials.

Electrical and optical characterization of SiONC dielectric thin film deposited by polymer-source chemical vapor deposition

2007 ◽  
Vol 101 (8) ◽  
pp. 084107 ◽  
Author(s):  
El Hassane Oulachgar ◽  
Cetin Aktik ◽  
Mihai Scarlete ◽  
Starr Dostie ◽  
Rob Sowerby ◽  
...  
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Optical Characterization ◽  
Dielectric Thin Film

Characterization of Pore Structure in a Nanoporous Low-Dielectric-Constant Thin Film by Neutron Porosimetry and X-ray Porosimetry

Langmuir ◽  
2004 ◽  
Vol 20 (16) ◽  
pp. 6658-6667 ◽  
Author(s):  
Ronald C. Hedden ◽  
Hae-Jeong Lee ◽  
Christopher L. Soles ◽  
Barry J. Bauer
Keyword(s):  
Thin Film ◽  
Dielectric Constant ◽  
Pore Structure ◽  
Low Dielectric Constant ◽  
X Ray ◽  
Low Dielectric
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