Description and characterization of a ECR plasma device developed for thin film deposition
2003 ◽
Vol 33
(1)
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pp. 123-127
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1988 ◽
Vol 46
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pp. 866-867
2016 ◽
Vol 18
(36)
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pp. 25329-25341
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1997 ◽
Vol 15
(2)
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pp. 307-312
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Keyword(s):
2001 ◽
Vol 142-144
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pp. 546-550
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Keyword(s):
2007 ◽
Vol 25
(4)
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pp. 1093-1097
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