scholarly journals GAS DISTRIBUTION SYSTEM FOR OPTIMIZATION OF THE TECHNOLOGICAL PROCESS OF COATING IN AN UNBALANCED MAGNETRON SPUTTERING INSTALLATION

2021 ◽  
Vol 3 ◽  
pp. 368-371
Author(s):  
Ivan Uzunov ◽  
Angel Lengerov
Keyword(s):  
Magnetron Sputtering ◽  
Technological Process ◽  
Distribution System ◽  
Vacuum Chamber ◽  
Design Solution ◽  
Gas Distribution ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

The paper proposes a new design solution for regulating the distribution of the working gases in the vacuum chamber of the installation (UDP -850/4) for unbalanced magnetron sputtering, which will improve the mode and quality of application of multilayer nano-coatings. Constructive documentation for manufacturing a gas distribution system has been prepared, as well as instructions for assembly to the vacuum chamber. 

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Synthesis of (Ti, Zr)N hard coatings by unbalanced magnetron sputtering

2000 ◽  
Vol 130 (1) ◽  
pp. 64-68 ◽  
Author(s):  
Da-Yung Wang ◽  
Chi-Lung Chang ◽  
Cheng-Hsun Hsu ◽  
Hua-Ni Lin
Keyword(s):  
Magnetron Sputtering ◽  
Hard Coatings ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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