scholarly journals Nitric Oxide Gas Sensors Using Multilayered Thin Film with Interspaces

2018 ◽  
pp. 1123 ◽  
Keyword(s):  
Thin Film ◽  
Nitric Oxide ◽  
Gas Sensors ◽  
Multilayered Thin Film

Atomic Layer Deposited Materials as Barrier Layers for Preservation of Nb Superconductivity in Multilayered Thin-Film Structures

2021 ◽  
pp. 1-1
Author(s):  
Vaibhav Gupta ◽  
Mark L. Adams ◽  
John A. Sellers ◽  
Noah Niedzwiecki ◽  
Nick Rush ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer ◽  
Multilayered Thin Film ◽  
Barrier Layers

Measurements of Residual Stress in the Layers of Thin Film Micro-Gas Sensors

2000 ◽  
Vol 657 ◽  
Author(s):  
Youngman Kim ◽  
Sung-Ho Choo
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Residual Stress ◽  
Gas Sensor ◽  
Gas Sensors ◽  
Micro Gas Sensor ◽  
Thin Film Layer ◽  
Film Layer ◽  
The Difference ◽  
Stress States

ABSTRACTThe mechanical properties of thin film materials are known to be different from those of bulk materials, which are generally overlooked in practice. The difference in mechanical properties can be misleading in the estimation of residual stress states in micro-gas sensors with multi-layer structures during manufacturing and in service.In this study the residual stress of each film layer in a micro-gas sensor was measured according to the five difference sets of film stacking structure used for the sensor. The Pt thin film layer was found to have the highest tensile residual stress, which may affect the reliability of the micro-gas sensor. For the Pt layer the changes in residual stress were measured as a function of processing variables and thermal cycling.

Effect of substrate on NO2-sensing properties of WO3 thin film gas sensors

2000 ◽  
Vol 375 (1-2) ◽  
pp. 142-146 ◽  
Author(s):  
Dae-Sik Lee ◽  
Ki-Hong Nam ◽  
Duk-Dong Lee
Keyword(s):  
Thin Film ◽  
Gas Sensors ◽  
Sensing Properties

Thin film tin oxide-based propane gas sensors

2000 ◽  
Vol 373 (1-2) ◽  
pp. 141-144 ◽  
Author(s):  
G Carbajal-Franco ◽  
A Tiburcio-Silver ◽  
J.M Domı́nguez ◽  
A Sánchez-Juárez
Keyword(s):  
Thin Film ◽  
Gas Sensors ◽  
Tin Oxide

Epitaxial growth of β-Ga2O3 (-201) thin film on fourfold symmetry CeO2 (001) substrate for heterogeneous integrations

2021 ◽  
Author(s):  
Xiao Tang ◽  
Kuanghui Li ◽  
Che-Hao Liao ◽  
Dongxing Zheng ◽  
chen Liu ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Epitaxial Growth ◽  
Gas Sensors ◽  
High Power ◽  
Wide Bandgap ◽  
Semiconductor Material ◽  
Uv Detectors ◽  
Wide Bandgap Semiconductor ◽  
Fourfold Symmetry

β-Ga2O3 is a wide bandgap semiconductor material promising for many fields such as gas sensors, UV detectors, and high power electronics. Until now, most epitaxial β-Ga2O3 thin films could only...

scholarly journals A tunable volatile organic compound sensor by using PtOx/GQDs/TiO2 nanocomposite thin films at room temperature under visible-light activation

RSC Advances ◽  
2017 ◽  
Vol 7 (63) ◽  
pp. 39859-39868 ◽  
Author(s):  
Shaofeng Shao ◽  
Yunyun Chen ◽  
Shenbei Huang ◽  
Fan Jiang ◽  
Yunfei Wang ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Visible Light ◽  
Gas Sensors ◽  
Room Temperature ◽  
Light Activation ◽  
Nanocomposite Thin Film ◽  
Nanocomposite Thin Films ◽  
Volatile Organic ◽  
Visible Light Activation

Pt/GQDs/TiO2 nanocomposite thin film-based gas sensors show tunable VOC sensing behaviour at room temperature under visible-light activation.

Temperature variation of the current-voltage characteristics of thin-film gas sensors

2006 ◽  
Vol 32 (1) ◽  
pp. 48-50 ◽  
Author(s):  
V. V. Simakov ◽  
O. V. Yakusheva ◽  
A. I. Grebennikov ◽  
V. V. Kisin
Keyword(s):  
Thin Film ◽  
Temperature Variation ◽  
Gas Sensors ◽  
Current Voltage ◽  
Current Voltage Characteristics
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