Impedimetric titanium dioxide thin-film gas sensors

ABSTRACTThe mechanical properties of thin film materials are known to be different from those of bulk materials, which are generally overlooked in practice. The difference in mechanical properties can be misleading in the estimation of residual stress states in micro-gas sensors with multi-layer structures during manufacturing and in service.In this study the residual stress of each film layer in a micro-gas sensor was measured according to the five difference sets of film stacking structure used for the sensor. The Pt thin film layer was found to have the highest tensile residual stress, which may affect the reliability of the micro-gas sensor. For the Pt layer the changes in residual stress were measured as a function of processing variables and thermal cycling.

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Effect of substrate on NO2-sensing properties of WO3 thin film gas sensors

Thin Solid Films ◽

10.1016/s0040-6090(00)01261-x ◽

2000 ◽

Vol 375 (1-2) ◽

pp. 142-146 ◽

Cited By ~ 78

Author(s):

Dae-Sik Lee ◽

Ki-Hong Nam ◽

Duk-Dong Lee

Keyword(s):

Thin Film ◽

Gas Sensors ◽

Sensing Properties

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Titanium Dioxide Thin Films as Methane Gas Sensors

IEEE Sensors Journal ◽

10.1109/jsen.2016.2619860 ◽

2016 ◽

Vol 16 (24) ◽

pp. 8890-8896 ◽

Cited By ~ 16

Author(s):

Buse Comert ◽

Nihan Akin ◽

Meltem Donmez ◽

Semran Saglam ◽

Suleyman Ozcelik

Keyword(s):

Thin Films ◽

Titanium Dioxide ◽

Gas Sensors ◽

Methane Gas ◽

Titanium Dioxide Thin Films

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Thin film tin oxide-based propane gas sensors

Thin Solid Films ◽

10.1016/s0040-6090(00)01122-6 ◽

2000 ◽

Vol 373 (1-2) ◽

pp. 141-144 ◽

Cited By ~ 18

Author(s):

G Carbajal-Franco ◽

A Tiburcio-Silver ◽

J.M Domı́nguez ◽

A Sánchez-Juárez

Keyword(s):

Thin Film ◽

Gas Sensors ◽

Tin Oxide

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Employment of Titanium dioxide thin film on NO2 gas sensing

Journal of Physics Conference Series ◽

10.1088/1742-6596/1879/3/032061 ◽

2021 ◽

Vol 1879 (3) ◽

pp. 032061

Author(s):

Israa Akram Abbas ◽

Salah Q. Hazaa ◽

Seham Hassan Salman

Keyword(s):

Thin Film ◽

Titanium Dioxide ◽

Gas Sensing

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Sol–gel synthesis and optical properties of titanium dioxide thin film

Modern Physics Letters B ◽

10.1142/s0217984918500768 ◽

2018 ◽

Vol 32 (09) ◽

pp. 1850076 ◽

Cited By ~ 3

Author(s):

Irfan Ullah ◽

Shaukat Ali Khattak ◽

Tanveer Ahmad ◽

Saman ◽

Nayab Ali Ludhi

Keyword(s):

Thin Film ◽

Titanium Dioxide ◽

Optical Properties ◽

Band Gap ◽

Surface Defects ◽

Sol Gel ◽

Luminescent Properties ◽

Localized States ◽

Indirect Transition ◽

Transmission And Absorption

The titanium dioxide (TiO2) is synthesized by sol–gel method using titanium-tetra-iso-propoxide (TTIP) as a starting material, and deposited on the pre-cleaned glass substrate using spin coating technique at optimized parameters. Energy dispersive X-ray (EDX) spectroscopy confirms successful TiO2 growth. The optical properties concerning the transmission and absorption spectra show 85% transparency and 3.28 eV wide optical band gap for indirect transition, calculated from absorbance. The exponential behavior of absorption edge is observed and attributed to the localized states electronic transitions, curtailed in the indirect band gap of the thin film. The film reveals decreasing refractive index with increasing wavelength. The photoluminescence (PL) study ascertains that luminescent properties are due to the surface defects.

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